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Systematic Errors in the Analysis of the Infrared Transmission Data Of Hydrogenated Amorphous Silicon

  • N. Maley (a1) and I. Szafranek (a1)

Abstract

The validity of the Brodsky, Cardona and Cuomo (BCC) [1] and the Connell and Lewis (CL) [2] methods to analyze infrared transmission data of hydrogenated amorphous silicon (a-Si:H) was examined using computer simulations. Transmission spectra for a-Si:H films 0-5¼m thick and containing up to 30 atomic% hydrogen were simulated assuming coherent reflections in the film and incoherent reflections in the c-Si substrate. Analysis of the simulated data for the 640cm−1 Si-H wagging mode shows that the BCC and CL techniques systematically overestimate the absorption coefficeint, α, and hence hydrogen content, CH, when the film thickness, d, is less than ∼l¼m. The error is nearly independent of CH and is as large as 80% in the limit d→0. On this basis, previously reported experimental evidence for the dependence of CH on d is shown to be an analysis artifact. A simple method to correct the hydrogen content determined by the BCC or CL analysis using only the film thickness is presented.

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Brodsky, M., Cardona, M., and Cuomo, J., Phys. Rev. B16. 3556 (1977).
2) Connell, G.and Lewis, A., Phys. Stat. Solidi B60, 291 (1973).
3) Maley, N., to be published.
4) MacLeod, H. A., Thin Film Optical Filters. 2nd edition (Adam Hilger, Bristol, 1986).
5) Freeman, E.and Paul, W., Phys. Rev. B18. 4288 (1978).
6) Hasegawa, S. and Imai, Y., Phil. Mag. B46. 239 (1982).
7) Currie, J., Depelsenaire, F., Galarneau, S., Lecuyer, J., Groleau, R., Bruyere, J., and Deneuville, A., J. de Physique 42, L373 (1981).

Systematic Errors in the Analysis of the Infrared Transmission Data Of Hydrogenated Amorphous Silicon

  • N. Maley (a1) and I. Szafranek (a1)

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