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Synthesis of Carbon Nitride Composite Thin Films Prepared by Pulsed Laser Deposition Method

  • Ashok Kumar (a1), R. B. Inturi (a2), U. Ekanayake (a1), H. L. Chan (a1), Q. You (a1), G. Watiuhewa (a1) and J. A. Barnard (a2)...

Abstract

Carbon nitride/titanium nitride composite coatings have been deposited on Si (100) and 7059 coming glass by in-situ pulsed laser deposition technique. A pulsed laser (λ = 248 nm) has been used to ablate the both pyrolytic graphite and TiN targets. It has been shown that TiN provides a lattice-matched structural template to seed the growth of carbon nitride crystallites (W. D. Sproul et. al., Appl. Phys. Lett. Vol. 67, 203–205; 1995). This paper describes the same approach to grow carbon nitride composite coatings with varying thicknesses of buffer layer and carbon nitride films at different temperatures and pressures. Our preliminary results show the superior mechanical properties (hardness and modulli). The films have been characterized by Xray diffractometer, SEM, FTIR and Raman spectroscopic techniques.

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