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Synthesis and Dispersion of Ultra-Small Binary and Ternary Metal Oxide Nanoparticles for Dielectric Thin Films

  • Tarik A. Cheema (a1), Dan Taroata (a2) (a3), Guenter Schmid (a2) and Georg Garnweitner (a1)

Abstract

Fabrication of dielectric thin films using dispersions of ultra-small ZrO2 and BaTiO3 nanoparticles with a low-temperature processing is reported. Highly crystalline and monodisperse cubic-ZrO2 and tetragonal-BaTiO3 nanoparticles were synthesized using non-aqueous approach. Post synthesis, nanoparticle dispersions were realized through chemical modification of their surface. The obtained dispersions were then employed for the fabrication of homogeneous and densely-packed dielectric thin films, verified through scanning electron microscopy.

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[1] Sigman, J., Brennecka, G.L., Clem, P.G., and Tuttle, B.A., “Fabrication of Perovskite-Based High-Value Intergrated Capacitors by Chemical Solution Deposition,” J. Am. Ceram. Soc, vol. 91, no. 6, pp. 18511857, 2008.
[2] Raj, P.M., Balaraman, D., Abothu, I.R., Yoon, C., Kang, N.K., and Tummala, R.R., “Integrating High-k Ceramic Thin Film Capacitors into Organic Substrates Via Low-Cost Solution Processing,” IEEE Trans. Compon. Packag. Technol, vol. 30, no. 4, pp. 585594, 2007.
[3] Vehkamäki, M., Hatanpää, T., Ritala, M., Leskelä, M., Väyrynen, S., and Rauhala, E., “Atomic Layer Deposition of BaTiO3 Thin Films - Effect of Barium Hydroxide Formation,” Chem. Vap. Deposition, vol. 13, pp. 239246, 2007.
[4] Nagata, H., Ko, S.W., Hong, E., Randall, C.A., Trolier-McKinstry, S., Pinceloup, P., Skamser, D., Randall, M., and Tajuddin, A., “Microcontact Printed BaTiO3 and LaNiO3 Thin Films for Capacitors,” J. Am. Ceram. Soc, vol. 89, no. 9, pp. 28162821, 2006.
[5] Kim, P., Jones, S.C., Hotchkiss, P.J., Haddock, J.N., Kippelen, B., Marder, S.R., and Perry, J.W., “Phosphonic Acid-Modified Barium Titanate Polymer Nanocomposites with High Permittivity and Dielectric Strength,” Adv. Mater, vol. 19, pp. 10011005, 2007.
[6] Garnweitner, G., Goldenberg, L.M., Sakhno, O.V., Antonietti, M., Niederberger, M., and Stumpe, J., “Large-scale synthesis of organophilic zirconia nanoparticles and their application in organic-inorganic nanocomposites for efficient volume holography,” Small, vol. 3, no. 9, pp. 16261632, 2007.
[7] Tsedev, N. and Garnweitner, G., “Surface Modification of ZrO2 Nanoparticles as Functional Component in Optical Nanocomposite Devices,” Mater. Res. Soc. Symp. Proc, pp. 1076-K05-03, 2008.
[8] Niederberger, M., Garnweitner, G., Pinna, N., and Antonietti, M., “Nonaqueous and Halide-Free Route to Crystalline BaTiO3, SrTiO3 and (Ba, Sr)TiO3 Nanoparticles via a Formation Mechanism Involving a C-C Bond Formation,” J. Am. Chem. Soc, vol. 126, no. 29, pp. 91209126, 2004.
[9] Petkov, V., Gateshki, M., Niederberger, M., and Ren, Y., “Atomic-Scale Structure of Nanocrystalline BaxSr1-xTiO3 (x = 1, 0.5, 0) by X-ray Diffraction and the Atomic Pair Distribution Function Technique,” Chem. Mater, vol. 18, no. 3, pp. 814821, 2006.

Keywords

Synthesis and Dispersion of Ultra-Small Binary and Ternary Metal Oxide Nanoparticles for Dielectric Thin Films

  • Tarik A. Cheema (a1), Dan Taroata (a2) (a3), Guenter Schmid (a2) and Georg Garnweitner (a1)

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