Hostname: page-component-848d4c4894-nr4z6 Total loading time: 0 Render date: 2024-05-05T09:50:05.626Z Has data issue: false hasContentIssue false
  • English
  • Français

Synthesis and Characterization of Self-Organized Nanostructure Arrays Generated by Laser Irradiation

Published online by Cambridge University Press:  21 March 2011

Yingfeng Guan  and
A.J. Pedraza
Yingfeng Guan
Affiliation:
Dept. of Materials Science and Engineering, The University of Tennessee, Knoxville, TN 37996
A.J. Pedraza
Affiliation:
Dept. of Materials Science and Engineering, The University of Tennessee, Knoxville, TN 37996
Get access

Abstract

One and two-dimensional arrays of nanoripples and nanoprotrusions can be generated by pulsed laser irradiation. Nanoprotrusions were produced on the surface of silicon when a Lloyd's mirror configuration was used, and could develop to a height of 80 nm. Atomic force and high resolution scanning electron microscopy studies revealed that these structures are preceded by the formation of extended ripples that can reach a height of up to 12 nm. It is shown that one or two identifiable arrays of mutually orthogonal ripples may form. Out of the four differently- spaced ripple arrays that were found, three indicated a very close connection with the production of laser-induced periodic surface structures (LIPSS). Interference of the incoming or refracted laser beam and the laser light scattered by surface undulations has been recognized as the cause of LIPSS formation. The present experiments show that the Lloyd's mirror configuration strongly enhances the formation of ripples and that nanoprotrusions form, sometimes at the intersection of two mutually orthogonal sets of ripples. Each of the beams, the directly incident and the mirror-reflected beam, independently produce an interference pattern with their corresponding scattered beams. However, these two independently generated patterns coincide because their periodicity is only a function of the angle of incidence. Thus, the two interference patterns reinforce each other's effects on the substrate. Single beam, direct irradiation of the substrate failed to induce nanoprotrusions, although 1-D ripple arrays developed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 818: Symposium M – Nanoparticles and Nanowire Building Blocks-Synthesis, Processing, Characterization and Theory , 2004 , M11.47.1
Copyright
Copyright © Materials Research Society 2004

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Baüerle, Dieter, Laser Processing and Chemistry, 3rd. Ed., Springer-Verlag, Berlin, (2000), Ch 28, pp.571–586.Google Scholar
2. Pedraza, A.J., Guan, Y.F., Fowlkes, J.D. and Smith, D.A., Journal of Vacuum Science and Technology B, submitted (2004).Google Scholar
3. Guosheng, Zhou, Fauchet, P.M., and Siegman, E., Phys. Rev. B 26, 5366 (1982).Google Scholar
4. Brueck, S.R.J. and Ehrlich, D.J., Phys. Rev. Lett. 48, 1678 (1982).Google Scholar
5. Young, Jeff F., Preston, J.S., Driel, H.M. van, and Sipe, J.E., Phys. Rev. B 27, 1155 (1982).Google Scholar
6. Fowlkes, J.D., Pedraza, A.J., Blom, D.A., and Meyer, H.M. III, Appl. Phys. Lett. 80, 3799 (2002).Google Scholar
7. Sipe, J.E., Young, Jeff F., Preston, J.S. and Driel, H.M. van, Phys. Rev. B 27, 1141 (1982).Google Scholar
8. Akhmanov, S.A., Emel'yanov, V.I., Koroteev, N.I., and Seminogov, V.N., Sov. Phys. Usp. 28, 1084 A. (1986).Google Scholar
9. Pedraza, Anthony J., Fowlkes, Jason D. and Guan, Yingfeng, Applied Physics A 77, 277 (2003).Google Scholar
10. Guan, Y.F., Pedraza, A.J., Fowlkes, J.D. and Joy, D.C., Journal of Vacuum Science and Technology B, submitted (2004).Google Scholar