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Synchrotron White Beam Topography Studies of Screw Dislocations in 6H-Sic Single Crystals

Published online by Cambridge University Press:  15 February 2011

S. Wang ,
M. Dudley ,
C. H. Carter Jr. ,
V. F. Tsvetkov  and
C. Fazi
S. Wang
Affiliation:
Dept. of Materials Science & Engineering, SUNY, Stony Brook, NY 11794–2275
M. Dudley
Affiliation:
Dept. of Materials Science & Engineering, SUNY, Stony Brook, NY 11794–2275
C. H. Carter Jr.
Affiliation:
Cree Research, Inc., 2810 Meridian Parkway, Durham, NC 27713
V. F. Tsvetkov
Affiliation:
Cree Research, Inc., 2810 Meridian Parkway, Durham, NC 27713
C. Fazi
Affiliation:
U.S.Army Research Laboratory, 2800 Powder Mill Rd., Adelphi, MD 20783.
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Abstract

Synchrotron white beam X-ray topography, along with optical microscopy and scanning electron microscopy, has been used to characterize structural defects which are potentially detrimental to device performance in PVT 6H-SiC single crystals. Line defects running along the [0001] axis, known as “micropipes”, were studied extensively. Detailed analysis of topographic image contrast associated with “micropipes”, based on the kinematical theory of X-ray diffraction, established that the so-called “micropipes” are screw dislocations with large Burgers vectors.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 375: Symposia AA – Applications of Synchrotron Radiation Techniques to Materials Science , 1994 , 281
Copyright
Copyright © Materials Research Society 1995

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