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Synchrotron Radiation Hard X-Ray Microprobe by Multilayer Fresnel Zone Plate

  • S. Tamura (a1), K. Ohtani (a1), M. Yasumoto (a1), K. Murali (a1), N. Kamuo (a2), H. Kihara (a2), K. Yoshida (a3) and Y. Suzuki (a4)...

Abstract

A hard X-ray microbeam with submicrometer spot size from synchrotron radiation (SR) sources is expected to add a new dimension to various X-ray analysis methods. A Fresnel zone plate (FZP) is one of the promising focusing elements for X-rays. In order to develop high performance multilayer FZP for use in the hard X-ray region, Cu/Al concentric multilayers were fabricated by use of a DC sputtering deposition process. Lower Ar gas pressure or higher rotating speed of a wire substrate has been effective in forming smoother multilayer interfaces. From a focusing test of the Cu/Al FZP (100-zones) by the SR (λ= 0.154nm), microbeams of 1.5 μm φ and 0.8 μm φ have been achieved for the first- and third-order focal beams, respectively.

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Synchrotron Radiation Hard X-Ray Microprobe by Multilayer Fresnel Zone Plate

  • S. Tamura (a1), K. Ohtani (a1), M. Yasumoto (a1), K. Murali (a1), N. Kamuo (a2), H. Kihara (a2), K. Yoshida (a3) and Y. Suzuki (a4)...

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