Hostname: page-component-848d4c4894-nmvwc Total loading time: 0 Render date: 2024-06-30T17:51:19.572Z Has data issue: false hasContentIssue false
  • English
  • Français

Surface Structure of Tetrahedral-Coordinated Amorphous Diamond-Like Carbon Films Grown by Pulsed Laser Deposition

Published online by Cambridge University Press:  28 February 2011

T. W. Mercer ,
N. J. DiNardo ,
L. J. Martinez-Miranda ,
F. Fang ,
T. A. Friedmann ,
J. P. Sullivan  and
M. P. Siegal
T. W. Mercer
Affiliation:
Drexel University, Department of Physics and Atmospheric Science, Philadelphia, PA 19104
N. J. DiNardo
Affiliation:
Drexel University, Department of Physics and Atmospheric Science, Philadelphia, PA 19104 University of Pennsylvania, Department of Materials Science and Engineering, Philadelphia, PA 19104
L. J. Martinez-Miranda
Affiliation:
Kent State University, Department of Physics, Kent, OH 44242 and University of Maryland, Department of Materials and Nuclear Engineering, College Park, MD 20742
F. Fang
Affiliation:
University of Pennsylvania, Department of Electrical Engineering, Philadelphia, PA 19104
T. A. Friedmann
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-0345
J. P. Sullivan
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-0345
M. P. Siegal
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185-0345
Get access

Abstract

The structure and composition of tetrahedral-coordinated amorphous diamondlike carbon films (a-tC) grown by pulsed laser deposition (PLD) of graphite has been studied with atomic force microscopy (AFM). The nanometer-scale surface structure has been studied as a function of growth parameters (e.g., laser energy density and film thickness) using contact-mode and tapping-mode AFM. Although the surfaces were found to be generally smooth, they exhibited reproducible structural features on several size scales which correlate with the variation of laser energy and the effects of excited ion etching.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 358: Symposium F – Microcrystalline and Nanocrystalline Semiconductors , 1994 , 863
Copyright
Copyright © Materials Research Society 1995

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 Siegal, M. P., Friedmann, T. A., Kurtz, S. R., Tallant, D. R., Simpson, R. L., Dominguez, F. and McCarty, K. F., in Mater. Res. Soc. Proc. (Materials Research Society, San Francisco, 1994), pp. 507.Google Scholar
2 Sandhu, G. S. and Chu, W. K., Appl. Phys. Lett. 55,437 (1989).Google Scholar
3 B., Carl. Collins and Farzin Davanloo, in Pulsed Laser Deposition of Thin Films Chrisey, D. B., Hubler, G. K., Eds. (John Wiley and Sons, Inc., New York, 1994), pp. 417.Google Scholar
4 Goforth, R. R. and Hammerling, P., J. Appl. Phys. 47, 3918 (1976).Google Scholar
5 Matzen, M. K. and Pearlman, J. S., Phys. Fluid 22, 449 (1979).Google Scholar
6 Puell, J., Z. Nat. Forsch. A25, 1807 (1970).Google Scholar
7 Stevefelt, J. and Collins, C. B., J. Phys. D: Appl. Phys. 24, 2149 (1991).Google Scholar
8 Watanabe, Ichiro, Hurata, Katsuhiko and Shimamura, Yoshikazu, Jpn. J. Appl. Phys. 33, 2035 (1994).Google Scholar