Skip to main content Accessibility help
×
Home

Surface structure and composition of nanocrystalline SnO2 thin films obtained by Chemical Vapor Deposition

  • Davide Barreca (a1), Elza Bontempi (a2), Laura E. Depero (a2), Cinzia Maragno (a3) and Eugenio Tondello (a3)...

Abstract

Nanocrystalline SnO2 thin films were synthesized by Chemical Vapor Deposition on Si(100) and Al2O3 substrates using bis(diethylamino)dimethylstannane(IV) [(CH3)2Sn(N(C2H5)2)2] as precursor. Film growth was performed at 400-500°C in an O2(H2O)+N2 atmosphere, with the aim of studying the effects of the synthesis conditions on the coating properties. The sample chemical composition and surface morphology were analyzed by X-ray Photoelectron Spectroscopy (XPS) and Atomic Force Microscopy (AFM), while their structural features were investigated by Glancing Incidence X-ray Diffraction (GIXRD) and X-ray Reflectivity (XRR). In this paper, the attention is focused on the interplay between film nanostructure and morphology, with particular regard to the influence of the growth surface.

Copyright

References

Hide All
1. Waal, H. De and Simonis, F., Thin Solid Films 77, 253 (1981).
2. Manifacier, J. C., Thin Solid Films 90, 297 (1982).
3. Jin, Z., Zhou, H. J., Jin, Z. L., Savinell, R. F. and Liu, C. C., Sens. Actuators, B 52, 188 (1998).
4. Varghese, O. K., Mahlotra, L. K. and Sharma, G. L., Sens. Actuators, B 55, 161 (1999).
5. Acciarri, M., Canevali, C., Mari, C. M., Mattoni, M., Ruffo, R., Scotti, R., Morazzoni, F., Barreca, D., Armelao, L., Tondello, E., Bontempi, E. and Depero, L. E., Chem. Mater. 15, 2646 (2003) and References therein.
6. Takahata, K., in Chemical Sensors Technology, Seiyama, T. (Kodansha, Tokyo, and Elsevier, Amsterdam, 1988).
7. Shimizu, Y. and Egashira, M., MRS Bull. 24, 18 (1999) and References therein.
8. Sangaletti, L., Depero, L. E., Allieri, B., Pioselli, F., Comini, E., Sberveglieri, G. and Zocchi, M., J. Mater. Res. 13, 2457 (1998) and References therein.
9. Barreca, D., Garon, S., Tondello, E. and Zanella, P., J. Phys. IV 9, 667 (1999).
10. Topas, P, copyright Bruker AXS Version 1.0.1 (1999).
11. Bontempi, E., PhD Thesis (University of Brescia, Italy, 2000).
12. Moulder, J. F., Stickle, W. F., Sobol, P. W., Bomben, K. D., Handbook of X-ray Photoelectron Spectroscopy, Perkin Elmer, Physical Electronics Division (Eden Prairie, MN, USA, 1992).
13. Barreca, D., Garon, S., Tondello, E. and Zanella, P., Surf. Sci. Spectra 7, 81 (2000).
14. Briggs, D., Seah, M. P., in Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy, J. Wiley & Sons (Chichester, UK, 1988).
15. Poirier, G. E., Cavicchi, R. E. and Semancik, S. J., J. Vac. Sci. Technol., A 12, 2149 (1994).
16. Morazzoni, F., Canevali, C., Chiodini, N., Mari, C., Ruffo, R., Scotti, R., Armelao, L., Tondello, E., Depero, L. E. and Bontempi, E., Mater. Sci. Eng., C 15, 167 (2001).
17. Yamazoe, N. and Miura, N., in Chemical Sensor Technology, Yamauchi, S. (Elsevier, New York, 1992), Vol. 4, p. 19.

Surface structure and composition of nanocrystalline SnO2 thin films obtained by Chemical Vapor Deposition

  • Davide Barreca (a1), Elza Bontempi (a2), Laura E. Depero (a2), Cinzia Maragno (a3) and Eugenio Tondello (a3)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed