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Surface Roughening, Columnar Growth and Intrinsic Stress Formation in Amorphous CuTi Films
Published online by Cambridge University Press: 10 February 2011
Abstract
The growth of amorphous CuTi films, prepared by electron beam evaporation, is investigated by Scanning Tunneling Microscopy (STM), Small Angle Neutron Scattering (SANS) and in situ measurements of intrinsic mechanical stresses (ISM). In early growth stages the films develop compressive stresses and, with increasing film thickness, a crossover to tensile stresses. In the same thickness range the STM investigations show a change in the growth mode. Our experiments suggest a transition from planar growth with statistical surface roughening to columnar growth.
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- Copyright © Materials Research Society 1997