Skip to main content Accessibility help
×
Home

Surface Reaction Mechanisms in Chemical Beam Epitaxy

  • John S. Foord (a1), Nagindar K. Singh (a1), Andrew T.S. Wee, Cathy L. French (a1) and Emma T. Fitzgerald (a1)...

Abstract

Surface reaction mechanisms which underly the growth of III-V semiconductors by chemical beam epitaxy have been investigated using a combination of surface spectroscopic techniques in conjunction with modulated molecular beam scattering techniques. Emphasis is placed on understanding the complex growth rate effects observed during the growth of Ga(Al,In)As and the origin of selected area epitaxy. These effects are shown to arise from the surface sensitive nature of the decomposition of the group III alkyl source chemicals used in CBE.

Copyright

Corresponding author

*To whom correspondence should be addressed

Footnotes

Hide All
**

current address: National University of Singapore, Department of Physics, Lower Kent Ridge Road, Singapore 0511.

Footnotes

References

Hide All
1. Proceedings of the Second International Conference on Chemical Beam Epitaxy, edited by Davies, G.J., Shih, H.D. and Tsang, W.T. (J. Cryst. Gr. 105, 1 (1990).
2. Lee, B.J., Huong, Y.M., Miller, J.N. and Turner, J.E., J. Cryst. Gr. 105, 168 (1990).
3. Kobayashi, N., Benchimol, J.L., Alexandre, F. and Gao, Y., Appl. Phys. Lett. 51, 1907 (1987).
4. Robertson, A., Chiu, T.H., Tsang, W.T., and Cunningham, J.E., J. Appl. Phys. 64, 877 (1988).
5. Murrell, A.J., Wee, A.T.S., Fairbrother, D.H., Singh, N. K., Foord, J.S., Davies, G.J. and Andrews, D.A., J. Appl. Phys. 68, 4053 (1990).
6. Martin, T. and Whitehouse, C.R., J. Cryst. Gr. 105, 57 (1990).
7. Robertson, A., Chiu, T.H. and Cunningham, J.E., J. Cryst. Gr. 95, 136 (1989).
8. Foord, J. S. and Wee, A.T.S., unpublished results
9. Andrews, D. A. and Davies, G.J., J. Appl. Phys 67, 3187 (1990)
10. Skevington, P.J., Davies, G.J., French, C.L., Wee, A.T.S. and Foord, J.S., unpublished results.
11. Imura, Y., Nogata, K., Aoyagi, Y. and Namba, S., J. Cryst. Gr. 105, 230 (1990).
12. Kayser, O., J. Cryst. Gr. in press

Surface Reaction Mechanisms in Chemical Beam Epitaxy

  • John S. Foord (a1), Nagindar K. Singh (a1), Andrew T.S. Wee, Cathy L. French (a1) and Emma T. Fitzgerald (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed