Hostname: page-component-848d4c4894-jbqgn Total loading time: 0 Render date: 2024-06-23T16:48:58.763Z Has data issue: false hasContentIssue false
  • English
  • Français

Surface Nitridation of Amorphous Carbon by Nitrogen Ion Beam Irradiation

Published online by Cambridge University Press:  01 February 2011

Chihiro Iwasaki ,
Masami Aono ,
Nobuaki Kitazawa  and
Yoshihisa Watanabe
Chihiro Iwasaki
Affiliation:
Department of Materials Science and Engineering, National Defense Academy, Kanagawa 239–8686, Japan
Masami Aono
Affiliation:
Department of Materials Science and Engineering, National Defense Academy, Kanagawa 239–8686, Japan
Nobuaki Kitazawa
Affiliation:
Department of Materials Science and Engineering, National Defense Academy, Kanagawa 239–8686, Japan
Yoshihisa Watanabe
Affiliation:
Department of Materials Science and Engineering, National Defense Academy, Kanagawa 239–8686, Japan
Get access

Abstract

Amorphous carbon was irradiated with a nitrogen ion beam and changes in composition and tribological properties after surface nitridation have been studied. The nitrogen ion beam energy was varied from 0.1 to 2.0 keV under the constant ion current density. Composition and chemical bonding states near the surface were analyzed by X-ray photoelectron spectroscopy (XPS). Tribological properties were studied by a pin-on-disk type tribotester. XPS studies show that the nitrogen concentration near the surface increases after nitrogen ion irradiation. The depth profiles of nitrogen in the irradiated specimens display that the nitrogen concentration near the surface is maximized after 0.2 to 0.7 keV ion irradiation. From the pin-on-disk testing, it is found that the friction coefficient of amorphous carbon increases after irradiation by 1.5 keV nitrogen ions, while the friction coefficient does not change drastically after irradiation by 0.2 keV ions.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 843: Symposium T – Surface Engineering-Fundamentals and Applications , 2004 , T3.1
Copyright
Copyright © Materials Research Society 2005

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Liu, A. Y. and Cohen, M. L., Science, 245, 841–842 (1989).Google Scholar
2. Okoshi, M., Kumagai, H. and Toyoda, K., Journal of Materials Research, 12, 3376–3379 (1997).Google Scholar
3. Marton, D., Boyd, K. J., Al-Bayati, A. H., Todorov, S. S. and Rabalais, J. W., Physical Review Letters, 73, 118–121 (1994).Google Scholar
4. Sjöström, H., Lungford, W., Hjörvarson, B., Xing, K. and Sundgren, J. E., Journal of Materials Research, 11, 981–988 (1996).Google Scholar
5. Chen, Y., Guo, L. and Wang, E. G., Journal of Physics: Condensed Matters 8, L685–L690 (1996).Google Scholar
6. Hoffman, A., Gousman, I., and Brener, R., Applied Physics Letters, 64, 845–847 (1994)Google Scholar
7. Gousman, I., Brener, R., Cytermann, C. and Hoffman, A., Surface and Interface Analysis, 22, 524–527 (1994).Google Scholar
8. Gousman, I., Brener, R., and Hoffman, A., Journal of Vacuum Science Technologies A, 17, 411–420 (1999).Google Scholar
9. Galán, L., Montero, I. and Rueda, F., Surface and Coatings Techinique, 83, 103–108 (1996).Google Scholar
10. Husein, I. F., Zhou, Y., Chan, C., Kleiman, J. I., Gudimenko, Y. and Leung, K.-N., Materials Research Society Symposium Proceedings, 396, “Ion-Solid Interactions for Materials Modification and Processing”, edited by Poker, D. B., Ila, D., Cheng, Y.-T., Harriott, L. R. and Sigmon, T. W., Materials Research Society, Pittsburgh, USA, pp. 255–260 (1996).Google Scholar
11. Iwasaki, C., Aono, M., Kitazawa, N. and Watanabe, Y., Materials Processing for Properties and Performance (MP3) Vol. 2, edited by Khor, K. A., Watanabe, Y., Komeya, K. and Kimura, H., Institute of Materials (East Asia), Singapore, pp. 494–502 (2004).Google Scholar
12. Ohta, H., Matsumuro, A. and Takahashi, Y., Japanese Journal of Applied Physics, 41, 7455–7461 (2002).Google Scholar
13. Tuinstra, F. and Koenig, J. L., Journal of Chemical Physics, 53, 1126–1130 (1970).Google Scholar