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Surface Morphology Of PZT Thin Films Prepared By Pulsed Laser Deposition

Published online by Cambridge University Press:  10 February 2011

Masaaki Yamazato ,
Masamitsu Nagano ,
Tomoaki Ikegami  and
Kenji Ebihara
Masaaki Yamazato
Affiliation:
Department of Chemistry and Applied Chemistry, Saga University, 1 Honjo-machi, Saga, 840-8502, JAPAN
Masamitsu Nagano
Affiliation:
Department of Chemistry and Applied Chemistry, Saga University, 1 Honjo-machi, Saga, 840-8502, JAPAN
Tomoaki Ikegami
Affiliation:
Department of Electrical and Computer Engineering, Kumamoto University, Kumamoto, 860-8555, JAPAN
Kenji Ebihara
Affiliation:
Department of Electrical and Computer Engineering, Kumamoto University, Kumamoto, 860-8555, JAPAN
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Abstract

Ferroelectric PbZr0.52Ti0.48O3(PZT)/YBa2 Cu3O7−x(YBCO) heterostructures on MgO substrate were fabricated by KrF pulsed laser deposition. The grid electrode was set between a substrate and target for improvement of surface morphology. The typical PZT layer had excellent ferroelectric properties; remnant polarization of 39 µC/cm2, coercive electric field of 41 kV/cm, loss tan δ=0.04, and dielectric constant of 950. X-ray diffraction results show that the films had highly c-axis and (a, b) plane orientation. The full widths at half-maximum (FWHM) of rocking curves was decreased with increasing the applied voltage of grid electrode. Atomic force microscopy (AFM) images of PZT layer showed that the film morphology was improved by using a grid electrode.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 617: Symposium J – Laser-Solid Interactionsfor Materials Processing , 2000 , J3.18
Copyright
Copyright © Materials Research Society 2000

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