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Surface Charge Imaging in Semiconductor Wafers by Surface Photovoltage (SPV)

Published online by Cambridge University Press:  22 February 2011

Piotr Edelman ,
Jacek Lagowski  and
Lubek Jastrzebski
Piotr Edelman
Affiliation:
Center for Microelectronics Research, University of South Florida, Tampa, FL and Semiconductor Diagnostics, Inc., Tampa, FL
Jacek Lagowski
Affiliation:
Center for Microelectronics Research, University of South Florida, Tampa, FL and Semiconductor Diagnostics, Inc., Tampa, FL
Lubek Jastrzebski
Affiliation:
Center for Microelectronics Research, University of South Florida, Tampa, FL and Semiconductor Diagnostics, Inc., Tampa, FL
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Abstract

We present fast, wafer-scale imaging of the surface charge achieved via non-contact measurement of the surface potential barrier by surface photovoltage (SPV) under high excitation levels. The approach is capable of resolving surface charge differences as small as 108 q/cm2. Fundamentals of surface charge imaging are discussed, and the method is compared with standard SPV contamination mapping. Examples include problems relevant to silicon IC fabrication and surface charge maps of GaAs and InP.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 261: Symposium D – Photo-Induced Space Charge Effects in Semiconductors: Electro-Optics, Photoconductivity and the Photorefractive Effect , 1992 , 223
Copyright
Copyright © Materials Research Society 1992

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References

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