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Surface and Interface Microstructure of Epitaxial Ferroelectric (Ba, Sr)Tio3 Thin Films

  • V. A. Alyoshin (a1), E. V. Sviridov (a1), Vi. M. Mukhortov (a1), I. N. Zakharchenko (a1) and V. P. Dudkevich (a1)...

Abstract

Surface and cross-section relief evolution of ferroelectric epitaxial (Ba,Sr)Ti03 films rf-sputtered on (001) MgO crystal cleavage surfaces versus the oxygen worKing gas pressure P and substrate temperature T were studied. Specific features of both three-dimensional and two-dimensional epitaxy mechanisms corresponding to various deposition conditions were revealed. Difference between low and high P-T-value 3D epitaxy was established. the deposition of films with mirror-smooth surfaces and perfect interfaces is shown to be possible.

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1 SurowiaK, Z., NiKitin, Y., BiryuKov, S., GolovKo, Y., MuKhortov, V. and DudKevich, V., Thin Solid Films. 208, 76 (1992).

Surface and Interface Microstructure of Epitaxial Ferroelectric (Ba, Sr)Tio3 Thin Films

  • V. A. Alyoshin (a1), E. V. Sviridov (a1), Vi. M. Mukhortov (a1), I. N. Zakharchenko (a1) and V. P. Dudkevich (a1)...

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