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Superconducting yba2cu3o7‐x Thin Film on Metal Substrate by Chemical Vapor Deposition Process.

  • T. Yamaguchi (a1), S. Aoki (a1), N. Sadakata (a1) and O. Kohno (a1)


Superconducting YBa2Cu307_x thin films were prepared by chemical vapor deposition using beta‐diketonate chelates on various oxide substrates and metal substrates. According to X‐ray diffraction patterns, the existence of a well‐oriented orthorhombic YBagCUgO^x structure has been confirmed in all specimens. The temperature of complete superconducting transition were observed at 89K on single‐crystalline oxide substrate, and 84K on metal substrate. Reduced critical current density of the film on single‐crystalline substrate in magnetic fields up to 600mT at 77K remained one or two order of magnitude higher than that of the film on metal substrate.



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1 Enomoto, Y., Murakami, T., Suzuki, M. and Moriwaki, K., Jpn.J.Appl.Phys. 26, L1248 (1987)
2 Oh, B., Naito, M., Arnason, S., Rosenthal, P., Barton, R., Beasley, M.R., Geballe, T.H., Hammond, R.H. and Kapitulunik, A., Appl.Phys.Lett. 51, 852 (1987)
3 Yamane, H., Masumoto, H., Hirai, T., Iwasaki, H., Watanabe, K., Kobayashi, N. and Muto, Y., Appl.Phys.Lett. 53, 1548 (1988)


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