Lithium niobate films were deposited on amorphous carbon, silicate glass, (0001) sapphire, and (100) silicon by spin or dip coating double metal ethoxide sols. The crystallinity and microstructure of the deposited films were examined by XRD and TEM. Crystallization behavior and resulting microstructure were strongly influenced by the type of substrate. The formation of crystalline LiNbO3 on amorphous carbon was detected at room temperature. Randomly oriented polycrystalline films were obtained on glass at 400°C. Choice of one mole of water per mole of ethoxide generated heteroepitaxial growth of LiNbO3 thin films on (0001) sapphire. Oriented but polycrystalline films were obtained on silicon. The electrical behavior of film on silicon was evaluated in metal-ferroelectric-semiconductor configuration. A dielectric constant of 35 and a dissipation factor of 0.004 was measured at 100 KHz.