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Submicron displacement measurements of MEMS using optical microphotographs in aqueous media: Enhancement using color image processing

  • Stephan Warnat (a1), Hunter King (a1), Rachael Schwartz (a1), Marek Kujath (a1) and Ted Hubbard (a1)...

Abstract

The measurement of precise submicron displacements is essential in several MEMS applications. For instance, the measurement of the mechanical parameters of biological cells requires repeatable measurement of displacements in the nanometer regime. This paper presents a method to make displacement measurements in an aqueous MEMS environment with a ± 10 nm accuracy by using the blue channel of RGB pictures in combination with a FFT phase shift analysis.

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References

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Keywords

Submicron displacement measurements of MEMS using optical microphotographs in aqueous media: Enhancement using color image processing

  • Stephan Warnat (a1), Hunter King (a1), Rachael Schwartz (a1), Marek Kujath (a1) and Ted Hubbard (a1)...

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