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A Study on the Strain and Microstructure in SiGe Film Grown on Si(001) Substrate by MBE

  • Kyoung-Ik Cho (a1), Sahn Nahm (a1), Sang-Gi Kim (a1), Seung-Chang Lee (a1), Kyung-Soo Kim (a1) and Sin-Chong Park (a1)...

Abstract

Si/Si0.8Ge0.2/Si(001) structures were grown at various growth temperatures (250 ∼ 760 °C) using molecular beam epitaxy, and the variation of strain and microstructure of the film was investigated using double crystal X-ray diffractometry and transmission electron microscopy. SiGe films with good single crystallinity were obtained at the growth temperatures of 440 ∼ 600 °C. For the samples grown below 350 °C, an amorphous SiGe film was developed over the SiGe single crystalline layer with a jagged amorphous/crystalline (a/c) interface, and many defects such as stacking faults and microtwins were formed below the a/c interface. Dislocations were developed through out the films for the samples grown above 680 °C. In addition, for the samples grown below 680 °C, the amount of in-plane strain of the SiGe film was found to be about − 8×l0−3 without strain relaxation. However, the SiGe films grown at 760 °C have small in-plain strain of − 4×l0−3 and large strain relaxation of 50%.

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1. King, C.A., Hoyt, J.L., Gronet, C.M., Gibbons, J.F., Scott, M.P., and Turner, J., IEEE ED Lett. 10(2), 52(1989).
2. Bean, J.C., Proc. IEEE 80, 571(1992).
3. Lee, S.C., Lee, J.Y., Yun, S.J., and Park, S.C., presented at the 8th Int’l. Conf. on MBE, Osaka, Japan, 1994.
4. Materials Aspects of GaAs and InP Based Structures, edited by Swaminathan, V. and Macrander, A.T. (Prentice Hall, New Jersey, 1991), pp. 181216.
5. Eaglesham, D.J., Gossmann, H.-J., and Cerullo, M., Phys. Rev. Lett. 65, 1227 (1990).
6. Smith, D.L., Chen, C.-C., Anderson, G.B., and Hagstrom, S.B., Appl. Phys. Lett. 62, 570 (1993).

A Study on the Strain and Microstructure in SiGe Film Grown on Si(001) Substrate by MBE

  • Kyoung-Ik Cho (a1), Sahn Nahm (a1), Sang-Gi Kim (a1), Seung-Chang Lee (a1), Kyung-Soo Kim (a1) and Sin-Chong Park (a1)...

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