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Study of Surface Morphological Evolution by Cluster Ion Irradiation on Solid Targets

Published online by Cambridge University Press:  11 February 2011

Takaaki Aoki ,
Atsuko Nakai ,
Jiro Matsuo  and
Gikan Takaoka
Takaaki Aoki
Affiliation:
Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo, Kyoto, 606–8501, JAPAN
Atsuko Nakai
Affiliation:
Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo, Kyoto, 606–8501, JAPAN
Jiro Matsuo
Affiliation:
Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo, Kyoto, 606–8501, JAPAN
Gikan Takaoka
Affiliation:
Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo, Kyoto, 606–8501, JAPAN
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Abstract

Smoothing effect by large gas cluster ion irradiation was studied. Ar cluster ion beams were irradiated on rough Si surface with various ion dosage. 100×100μm2 AFM image was measured for each surface. These AFM images were treated with fast Fourier transform in order to examine the change of surface morphologies with cluster ion irradiation. Power spectra analysis showed that the intensity at each wave number (the inverse number of wavelength) exponentially decreases with ion dose. The relationship between smoothing rate and wave number was derived. The surface smoothing process was modeled with the use of this wave number dependence on decreasing rate. The calculated and the experimental surface profiles are in good agreements. With this model, roughness of cluster-irradiated surface can be calculated from initial surface images.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 749: Symposium W – Morphological and Compositional Evolution of Thin Films , 2002 , W17.9
Copyright
Copyright © Materials Research Society 2003

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References

REFERENCES

1. Yamada, I., Matsuo, J., Insepov, Z., Aoki, T., Seki, T. and Toyoda, N., Nucl. Instr. and Meth. B, 164–165 (2000) 944.Google Scholar
2. Seki, T., Matsuo, J., Takaoka, G. and Yamada, I., Nucl. Instr. and Meth. B, in press.Google Scholar
3. Seki, T., Aoki, T., Tanomura, M., Matsuo, J. and Yamada, I., Mater. Chem. and Phys., 54 (1998) 143.Google Scholar
4. Nordlund, K., Keinonen, J., Ghaly, M. and Averback, R. S., Nucl. Instr. and Meth. B, 148 (1999) 74 Google Scholar
5. Aoki, T., Seki, T.. Matsuo, J., Insepov, Z. and Yamada, I., Nucl. Instr. and Meth. B, 153 (1999) 264.Google Scholar
6. Matsuo, J., Katsumata, H., Minami, E. and Yamada, I., Nucl. Instr. and Meth., B 161–163 (2000) 952.Google Scholar
7. Yoshida, A., Deguchi, M., Kitabatake, M., Hirao, T., Matsuo, J., Toyoda, N., Yamada, I., Nucl. Instr. and Meth. B, 112 (1996) 249.Google Scholar
8. Toyoda, N., Kitani, H., Hagiwara, N., Matsuo, J. and Yamada, I., Mater. Chem. and Phys., 54 (1998) 106.Google Scholar
9. Sun, J. J.,a) Shimazawa, K., Kasahara, N., Sato, K., Kagami, T., Saruki, S., Araki, S. and Matsuzaki, M., J. Appl. Phys., 89 (2001), 6653.Google Scholar
10. Toyoda, N., Hagiwara, N., Matsuo, J., Yamada, I., Nucl. Instr. and Meth. B, 148 (1999), 639.Google Scholar
11. Moseler, M., Rattunde, O., Nordiek, J., Haberland, H., Nucl. Instr. and Meth. B, 164–165 (2000), 522.Google Scholar
12. Rattunde, O., Moseler, M., Häfele, A., Kraft, J., Rieser, D., Haberland, H., J. Appl. Phys., 90 (2001), 3226.Google Scholar