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Study of Ion Implanted Copper Laser Mirrors by Spectroscopic Ellipsometry

Published online by Cambridge University Press:  28 February 2011

P. G. Snyder ,
A. Massengale ,
K. Memarzadeh ,
J. A. Woollam ,
D. C. Ingram  and
P. P. Pronko
P. G. Snyder
Affiliation:
University of Nebraska, Lincoln, NE 68588-0511
A. Massengale
Affiliation:
University of Nebraska, Lincoln, NE 68588-0511
K. Memarzadeh
Affiliation:
University of Nebraska, Lincoln, NE 68588-0511
J. A. Woollam
Affiliation:
University of Nebraska, Lincoln, NE 68588-0511
D. C. Ingram
Affiliation:
Universal Energy Systems, Dayton, OH 45432
P. P. Pronko
Affiliation:
Universal Energy Systems, Dayton, OH 45432
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Abstract

Implantation with 400 keV Ag or Cu ions improves the near-surface microstructural quality and reflectance of diamond turned and mechanically polished flat copper laser mirrors. Spectroscopic ellipsometry is sensitive to changes in either the microscopic surface roughness, or in the nearsurface substrate void fraction, and both parameters are observed to change upon implantation. Substrate density as a function of ion fluence peaks at about 5 × 10 15cm-2. Low energy (300 eV) Ar ion implantation can cause either a reduction or increase in microscopic surface roughness, depending on fluence.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 74: Symposium A – Beam-Solid Interactions and Transient Processes , 1986 , 535
Copyright
Copyright © Materials Research Society 1987

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References

1. Snyder, P.G., Rost, M.C., Bu-Abbud, G.H., Oh, J., Woollam, J.A., Poker, D., Aspnes, D.E., Ingram, D., and Pronko, P., J. Appl. Phys. 60, 779 (1986).CrossRefGoogle Scholar
2. Bu-Abbud, G.H., Mathine, D.L., Snyder, P.G., Woollam, J. A, Poker, D., Bennett, J., Ingram, D., and Pronko, P., J. Appl. Phys. 59, 257 (1986).CrossRefGoogle Scholar
3. Aspnes, D.E., Kinsbron, E., and Bacon, D.D., Phys. Rev. B 21, 3290 (1980).CrossRefGoogle Scholar
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