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Study of a-Si:H/μc-Si:H Heterojunction as Photosensor for Large Screen Projection Display

  • Weiqiang Han (a1), Gaorong Han (a1), Jianmin Qiao (a2), Pija Du (a1), Danmei Zhao (a1) and Zishang Ding (a1)...

Abstract

Liquid crystal light valve(LCLV) using an a-Si:H/μc-Si:H heterostructure as the photosensor and the nematic liquid crystal as the modulator has been firstly presented for large screen projection display. The a-Si:H photoconductor and μc-Si:H light blocking layer were prepared by a modified glow discharge CVD method. The optoelectric and structure properties of the μc-Si:H films deposited at different deposition conditions have been studied. The a-Si:H film and the continuously deposited pc-Si:H film possibly form an a-Si:H/μc-Si:H heterojunction. The electrical and optoelectric properties of the heterojunction has been studied.

LCLV using a-Si:H/μc-Si:H heterostructure has shown that the most aspects of the device performance can be improved.

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Study of a-Si:H/μc-Si:H Heterojunction as Photosensor for Large Screen Projection Display

  • Weiqiang Han (a1), Gaorong Han (a1), Jianmin Qiao (a2), Pija Du (a1), Danmei Zhao (a1) and Zishang Ding (a1)...

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