Skip to main content Accessibility help
×
Home

A Study of APCVD-Deposited TiO2Characteristics in the Structure of a Tunneling Transistor

  • A. Behnam (a1), B. Hekmatshoar (a1), S. Mohajerzadeh (a2), B. Arvan (a1), F. Karbassian (a1) and A. Khakifirooz (a1)...

Abstract

TiO2 and nickel-silicide layers are consequently deposited and micro machined to compose a mesa-structured tunneling transistor. The depositions are done with the RF-sputtering method and the electrical and physical characteristics of the products are investigated. Transistors show an amplification coefficient of about 20. To improve the quality and coverage of the TiO2 layer, the oxide deposition is made by means of an APCVD reactor. The grown oxide shows a dielectric coefficient between 19 and 21 and its breakdown field is about 107 V/cm.

Copyright

References

Hide All
[1] Hobbs, C., Hegde, R. and Maiti, B., Symposium on VLSI Technology Digest of Technical Papers, pp.133135 (1999).
[2] Aarik, J., Aidla, A. and Mandar, H., Appl. Surf. Sci., Vol.172, pp.148158 (2001).
[3] Aarik, J., Aidla, A. and isler, A.A. Ki, Thin Solid Films, Vol.305, pp.270273 (1997).
[4] Kim, B., Byun, D. and Kee Lee, J., Japanese Journal of the Applied Physics, Vol.41, Part. 1, No.1, pp.222226 (2002).
[5] Tahara, S., et al. , Japanese Journal of the Magnetic, Vol.27, pp.167171 (2003).
[6] Seabaugh, A., Integration Workshop, Dec. (1999).
[7] Pacha, C., et al. , 24th European Solid-State Circuits Conference, Sep. (1998).
[8] Majkusiak, B., IEEE Transactions on Electron Devices, Vol.45, No.9, Sep. (1998).
[9] Taniyama, H., IEEE Transactions on Electron Devices, Vol.41, No.3, Mar. (1994).
[10] Otto, A., Europhysics Letters, Vol.62, No.3, pp.398404 (2003).
[11] Grekhov, I.V., Cryogenics, Vol.38, No.6 (1998).

A Study of APCVD-Deposited TiO2Characteristics in the Structure of a Tunneling Transistor

  • A. Behnam (a1), B. Hekmatshoar (a1), S. Mohajerzadeh (a2), B. Arvan (a1), F. Karbassian (a1) and A. Khakifirooz (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed