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Studies of the Early Oxidation of Silicon (111) in Atomic Oxygen*

  • Bhola N. De (a1), Jane Hruska (a1), Jane Peterkin (a1), Yong Zhao (a1) and John A. Woollam (a1)...

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Research supported by NASA Lewis Research Center Grant No. NAG-3-95.

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1 Murali, V. and Murarka, S.P., J. Appl. Phys. , 60, 2106 (1986).
2 Hu, S.M., J. Appl. Phys., 55, 4095 (1984).
3 Massoud, H.Z., Plummer, J.D. and Irene, E.A., J. Electrochem. Soc., 132, 2685 (1985); ibid., 132, 2693 (1985).
4 Farres, E., Sune, J., Placencia, I., Barniol, N. and Aymerich, X., phys. stat. sol. (a), 114, 167 (1989).
5 Aptekar, S., Fernandes, M., and Kwong, D.L., J. Electrochem. Soc., 132, 1448 (1985).
6 Lawless, K.R., Rep. Prog. Phys., 37, 231 (1974).
7 Deal, B.E. and Grove, A.S., J. Appl. Phys., 36, 3770 (1965).
8 De, B.N., Zhao, Y., Snyder, P.G., Woollam, J.A., Coutts, T.J. and Li, X., Surface and Coatings Technology, 1990 (accepted).
9 Azzam, R.M.A. and Bashara, N.M., Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).
10 Snyder, P.G., Rost, M.C., Bu-Abbud, G.H., Woollam, J.A. and Alterovitz, S.A., J. Appl. Phys., 60, 3293 (1986).
11 Alterovitz, S.A., Woollam, J.A. and Snyder, P.G., Solid State Technol., 31, 99 (1988).
12 Bu-Abbud, G.H., Bashara, N.M. and Woollam, J.A., Thin Solid Films. 138, 27 (1986) .
13 Ash, M. and Ash, I., Eds., Encyclopedia of Plastics, Polymers, and Resins, Vol. II (Chemical Publishing Co., New York, 1982).

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Studies of the Early Oxidation of Silicon (111) in Atomic Oxygen*

  • Bhola N. De (a1), Jane Hruska (a1), Jane Peterkin (a1), Yong Zhao (a1) and John A. Woollam (a1)...

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