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Structure of Amorphous A12O3 Produced by Ion Implantation

  • C. J. Mchargue (a1), P. S. Sklad (a1), P. Angelini (a1), C. W. White (a1), J. C. Mccallum (a1), A. Perez (a1) and G. Marest (a2)...

Abstract

The amorphous state can be produced in α-Al2O3 by ion beam induced displacements at 77 K or by displacements combined with chemical effects at room temperature. Progress toward understanding the amorphization process has been made from studies of the short-range order, electronic charge on implanted species, and the critical composition for amorphization. Results are presented for implantation of Al + O in the stoichiometric ratio, zirconium, iron, and tin.

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Structure of Amorphous A12O3 Produced by Ion Implantation

  • C. J. Mchargue (a1), P. S. Sklad (a1), P. Angelini (a1), C. W. White (a1), J. C. Mccallum (a1), A. Perez (a1) and G. Marest (a2)...

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