- Cited by 21
Zhang, Jinping and Grammon, D. S. 1996. Stress Evolution During Crystallization and Isothermal Annealing of Titanium-Nickel on (100) Si. MRS Proceedings, Vol. 459, Issue. ,
Grummon, D. S. and Pence, T. J. 1996. Thermotracttve Titanium-Nickel thin Films Formicroelectromechanical Systems and Active Composites. MRS Proceedings, Vol. 459, Issue. ,
Zorman, Christian A Mehregany, Mehran Kahn, Harold and Heuer, Arthur H 1997. New developments in MEMS using SiC and TiNi shape memory alloy materials. Current Opinion in Solid State and Materials Science, Vol. 2, Issue. 5, p. 566.
Skrobanek, K.D. Kohl, M. and Miyazaki, S. 1997. Stress-optimised shape memory microvalves. p. 256.
Tabib-Azar, Massood 1998. Microactuators. p. 127.
Sato, M Ishida, A and Miyazaki, S 1998. Two-way shape memory effect of sputter-deposited thin films of Ti 51.3 at.% Ni. Thin Solid Films, Vol. 315, Issue. 1-2, p. 305.
Kohl, M. Skrobanek, K.D. and Miyazaki, S. 1999. Development of stress-optimised shape memory microvalves. Sensors and Actuators A: Physical, Vol. 72, Issue. 3, p. 243.
Wuttig, Manfred Slutsker, J. S. Mori, Kiyotaka and Li, Jiang 1999. Stress-Induced Martensite in NiTi Corrugated Films. MRS Proceedings, Vol. 604, Issue. ,
Wuttig, Manfred Zheng, Yun Slutsker, J.S Mori, Kiyotaka and Su, Quanmin 1999. Stress induced martensite in NiTi corrugated films. Scripta Materialia, Vol. 41, Issue. 5, p. 529.
Chen, J.Z. and Wu, S.K. 1999. Crystallization behavior of r.f.-sputtered TiNi thin films. Thin Solid Films, Vol. 339, Issue. 1-2, p. 194.
Ishida, A Sato, M and Miyazaki, S 1999. Mechanical properties of Ti–Ni shape memory thin films formed by sputtering. Materials Science and Engineering: A, Vol. 273-275, Issue. , p. 754.
Grummon, David S and Gotthardt, Rolf 2000. Latent strain in titanium–nickel thin films modified by irradiation of the plastically-deformed martensite phase with 5 MeV Ni2+. Acta Materialia, Vol. 48, Issue. 3, p. 635.
James, R.D. and Hane, K.F. 2000. Martensitic transformations and shape-memory materials. Acta Materialia, Vol. 48, Issue. 1, p. 197.
Fu, Yongqing and Du, Hejun 2002. Relaxation and recovery of stress during martensite transformation for sputtered shape memory TiNi film. Surface and Coatings Technology, Vol. 153, Issue. 1, p. 100.
Fu, Yongqing and Du, Hejun 2003. Effects of film composition and annealing on residual stress evolution for shape memory TiNi film. Materials Science and Engineering: A, Vol. 342, Issue. 1-2, p. 236.
Takashima, Kazuki and Ishida, Akira 2008. Comprehensive Microsystems. p. 53.
Ishida, A. and Sato, M. 2008. Ti–Ni–Cu shape-memory alloy thin film formed on polyimide substrate. Thin Solid Films, Vol. 516, Issue. 21, p. 7836.
Ishida, Akira and Sato, Morio 2010. Development of Polyimide/SMA Thin-Film Actuator. Materials Science Forum, Vol. 654-656, Issue. , p. 2075.
Kotnur, V.G. Tichelaar, F.D. and Janssen, G.C.A.M. 2013. Sputter deposited Ni–Ti thin films on polyimide substrate. Surface and Coatings Technology, Vol. 222, Issue. , p. 44.
Mohri, Maryam Nili-Ahmadabadi, Mahmoud PouryazdanPanah, Mohsen and Hahn, Horst 2016. Evaluation of structure and mechanical properties of Ni-rich NiTi/Kapton composite film. Materials Science and Engineering: A, Vol. 668, Issue. , p. 13.
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Deposition of crystalline titanium-nickel shape-memory alloys on polymeric substrates is complicated by the elevated temperatures that must be withstood either during deposition or during post-deposition crystallization anneals. In this paper we report results on thin films of titanium-nickel, with Ni-rich compositions, which were prepared by dc magnetron sputtering onto quartz substrates, and onto thin polyimide membranes, at various elevated substrate temperatures between 623K and 703K. All of the as-deposited films possessed ordered bcc microstructures and had nano-scale grain sizes. Films deposited at the higher end of the temperature range displayed familiar two-step transformation behavior in electrical resistivity experiments, with transformation temperatures that were stable with respect to annealing for 22-hrs at 700K. Classic shape-memory was observed for a bilayer consisting of an 7.6 μm thick Kapton® polyimide sheet onto which 3 μm of near-equiatomic TiNi had been sputtered at 703K. By applying a pattern-etch technique to the metallized polymer we were able to fabricate a prototype electrically-excitable thin-film actuating element, potentially applicable to microelectromechanical and biomechanical systems.
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