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Structure and Properties of W and Mo-Subcontact Layers Influenced by Thermal Annealing

Published online by Cambridge University Press:  15 February 2011

K. A. Gesheva ,
G. Stoyanov ,
A. Harizanova  and
R. Stefanov
K. A. Gesheva
Affiliation:
Central Laboratory of Solar Energy and New Energy Sources at Bulgarian Academy of Sciences, Blvd.“Tzarigradsko shosse”72, 1784 Sofia, Bulgaria
G. Stoyanov
Affiliation:
Central Laboratory of Solar Energy and New Energy Sources at Bulgarian Academy of Sciences, Blvd.“Tzarigradsko shosse”72, 1784 Sofia, Bulgaria
A. Harizanova
Affiliation:
Central Laboratory of Solar Energy and New Energy Sources at Bulgarian Academy of Sciences, Blvd.“Tzarigradsko shosse”72, 1784 Sofia, Bulgaria
R. Stefanov
Affiliation:
Central Laboratory of Solar Energy and New Energy Sources at Bulgarian Academy of Sciences, Blvd.“Tzarigradsko shosse”72, 1784 Sofia, Bulgaria
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Abstract

One of the most important problems to solve in order to improve the CdTe solar cell performance is the deposition of stable ohmic contacts. W and Mo with their high work function, high temperature stability and good mechanical properties are prospective materials for contacts to p-CdTe. This paper presents data for the electrophysical characteristics of W or Mo/CdTe and W or Mo/ CdS-CdTe heterostructure systems. W and Mo films are deposited by a W(CO)6 based CVD process at atmospheric pressure and low temperatures (250–300)°C. We emphasize the improvment of the contact properties by developing a transitional layer heavily doped with acceptors. The defects arrangement in the layer should promote the diffusion of such impurities as Cu, P, As etc. A proper balance between the impurities and the defects could be achieved by suitable thermal treatment. Rapid thermal or traditional annealing in different gas atmospheres – N2, Ar or air were applied, followed by chemical or electrochemical treatment. Electrical characteristics measurements and structural studies were performed for CdTe layers as well as for the SnO2 - CdS - CdTe structures

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 403: Symposium I – Polycrystalline Thin Films: Structure, Texture, Properties and Applications II , 1995 , 477
Copyright
Copyright © Materials Research Society 1996

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References

1. Gesheva, K.A., Vlakhov, E.S. and Stoyanov, G.I., Proc. Advanced Metallization for ULSI Applications in 1994, Oct.4–6, 1994, in Austin, Texas.Google Scholar
2. Gesheva, K.A., Krisov, T.A., Simkov, U.I. and Beshkov, G.D., Applied Surface Science, Vol.73, p. 86–89(1993).Google Scholar
3. Gesheva, K.A., Stoyanov, G.I., Stefanov, R. and Vlakhov, E.S., MRS Sympos.Proc., Volume 363, Chemical Vapor Deposition of Refractory Metals and CeramicsIII,ed.Gallois, Bernard M., Lee, W. Y., Michael A. Pickering, Pittsburgh, PA, 1995 Google Scholar
4. Palatnik, L., Fuks, M., Kosevich, V., Moskow, EML, p.320(1972)Google Scholar
5. Stoev, M. and Kaferski, At., J..Materials Chemistry 1995 - in pressGoogle Scholar
6. Buckly, R.W., Stoev, M., Touskova, S., Kindle, D., Tousek, J., Proc.13th European Photovoltaic Solar Energy Conference, 23–25 October, 1995, Nice, FranceGoogle Scholar
7. Stoev, M., Katerski, A., Stefanov, R., Surface and thin film analysis of CdTe layers for Solar Cells, presented at the Symp. for Electron and Ion Technol., Sozopol, Sept. 18, 1995.Google Scholar
8. Tiwari, A.N., Zogg, H., Blunier, S., Kessler, K., Maissen, C. and Masek, J., Int. J. Solar Energy, Vol. 12, pp.187–195(1992).Google Scholar
9. A. Gessert,Li, X., Couts, T.J., Mason, A.R., and Matson, R.J., presented at the 40th Symp.of the American Vacuum Society, Orlando, FL, USANov. 15–19,1993.Google Scholar