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Structure and Photoluminescence of Hydrogenated Amorphous Carbon Films Produced by Using Aromatic Hydrocarbon Source

  • Jun Xu (a1), Tianfu Ma (a1), Wei Li (a1), Li Wang (a1), Zhifeng Li (a2) and Kunji Chen (a1)...

Abstract

The organic carbon source –xylene(C6H6-C2H4), was used to fabricate a-C:H films in plasma enhanced chemical vapor deposition system. The structures and bonding configurations were characterized and compared with that of conventional methane-based samples by using Fourier Transform Infrared spectroscopy and Raman scattering technique. Strong room temperature luminescence in blue-green light range was found and the PL feature was quite different from that of methane-based a-C:H films.

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Structure and Photoluminescence of Hydrogenated Amorphous Carbon Films Produced by Using Aromatic Hydrocarbon Source

  • Jun Xu (a1), Tianfu Ma (a1), Wei Li (a1), Li Wang (a1), Zhifeng Li (a2) and Kunji Chen (a1)...

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