We have made NiFe2O4 films by rf sputtering using the 90 °off-axis geometry. Films grown at 600°C on SrTiO3 and Y.15Zr.85O2 substrates are single crystals with (100) and (110) texture, respectively, but exhibit a very large and unexpected random anisotropy. A postdeposition air anneal at ˜1000°C has little effect on the crystallinity of the films but almost completely eliminates the random anisotropy; the remaining anisotropy is consistent with expected (bulk) values. A decrease of the saturation magnetization, indicating degradation, was observed for films on SrTiO3 (but not Y.15Zr.85O2) annealed at 1300°C.
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