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Structural Properties of Pdxs/V Multilayer thin Films

  • G. D. Lewen (a1) and M. B. Stearns (a1)

Abstract

The structures of e-beam evaporated Pd/V multilayer thin films have been studied under various film growth conditions. Both the deposition rate and the substrate temperature were varied in an e-beam source UHV deposition system, and the films were subsequently characterized by xray scattering and cross-sectional TEM.

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1 Petford-Long, A. K., Stearns, M.B., Chang, C.-H., Nutt, S.R., Stearns, D.G., Ceglio, N.M., and Hawryluk, A.M., J. Appl. Phys., 61(4), 1422 (1987).
2 Lee, C. H., Ph. D. thesis, Arizona State University, 1987.
3 Steams, M. B., Phys. Rev. B.38, 8109 (1988).
4 Stearns, D. G., Stearns, M.B., Stith, J.H., and Ceglio, N.M., J. Appl. Phys., 67(5), 2415 (1990).
5 Lewen, G. D., M. S. thesis, Arizona State University, 1990.

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Structural Properties of Pdxs/V Multilayer thin Films

  • G. D. Lewen (a1) and M. B. Stearns (a1)

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