Skip to main content Accessibility help
×
Home

Structural Inhomogeneity of SrBi2Ta2O9Thin Films Prepared by Layer-by-Layer Technique

  • J. B. Xu (a1), G. D. Hu (a1) and S. P. Wong (a1)

Abstract

Grazing incidence x-ray diffraction has been employed to perform the depth-profile analysis on SrBi2Ta2O9 (SBT) thin films with different preferential orientations. For the polycrystalline SBT thin film, the change in structural orientation occurs only within the 15-nm-thick top layer, which is associated with the formation of the (200)-predominant SBT thin film prepared by the layer-by-layer annealing process. The inhomogeneity of structural orientation is more significant in the full film thickness for the (200)- predominant SBT thin film. (0010) peak can only be observed for the grazing angle larger than 0.6°. A layer with the highest ratio of I(200)/I(115) is found in the top surface layer (i.e., the latest layer during deposition) of the (200)-predominant SBT thin film.

Copyright

References

Hide All
1. Arauzo, C. A. -Paz de, Cuchiaro, J. D., McMillan, L. D., Scott, M. C., and Scott, J. F., Nature (London) 374, 627 (1995)
2. Kim, Seung-Hyun, Kim, D. J., Maria, J. -P., Kingon, A. I., Streiffer, S. K., Im, J., Auciello, O., and Krauss, A. R., Appl. Phys. Lett. 76, 496 (2000)
3. Aizawa, Koji, Tokumitsu, Eisuke, Okamoto, Kojiro, and Ishiwara, Hiroshi, Appl. Phys. Lett. 76, 2609 (2000)
4. Desu, S. B., and Vijay, D. P., Mater. Sci. Eng. B32, 83 (1995)
5. Hu, G. D. and Xu, J. B. (unpublished)
6. Hu, G. D., Wilson, I. H., Xu, J. B., Cheung, W. Y., Wong, S. P., and Wong, H. K., Appl. Phys. Lett. 74, 1221 (1999)
7. Hu, G. D., Xu, J. B., and Wilson, I. H., Appl. Phys. Lett. 75, 1610 (1999)
8. Hu, G. D., Xu, J. B., Wilson, I. H., Cheung, W. Y., and Wong, S. P., Appl. Phys. Lett. 74, 3711, (1999)
9. Hu, G. D., Wilson, I. H., Xu, J. B., Li, C. P., and Wong, S. P., Appl. Phys. Lett. 76, 1758 (2000)
10. Toney, M. F., Huang, T. C., Brennan, S. and Rek, Z., J. Mater. Res. 3, 351 (1988)
11. Neerinck, D. G. and Vink, T. J., Thin Solid Films 278, 12 (1996)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed