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Structural and Elastic Properties of HF/ZR Multilayer Thin Films

Published online by Cambridge University Press:  21 February 2011

W. J. Meng ,
G. L. Eesley ,
K. Svinarich  and
G. P. Meisner
W. J. Meng
Affiliation:
Physics Department, General Motors Research Laboratories, Warren, MI 48090
G. L. Eesley
Affiliation:
Physics Department, General Motors Research Laboratories, Warren, MI 48090
K. Svinarich
Affiliation:
Department of Physics and Astronomy, Wayne State University, Detroit, Michigan
G. P. Meisner
Affiliation:
Physics Department, General Motors Research Laboratories, Warren, MI 48090
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Abstract

We have investigated structural and elastic properties of Hf/Zr multilayer thin films by x-ray diffraction and transient piezoreflectance measurements. Similar structural and elastic behaviors have been observed in two series of samples grown at different deposition rates (1 – 10Å/sec). Our measurements suggest different (˜ 10%) effective elastic constants between multilayers with coherent and incoherent interfaces.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 187: Symposium J – Thin Film Structures and Phase Stability , 1990 , 321
Copyright
Copyright © Materials Research Society 1990

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