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Structural and Elastic Properties of HF/ZR Multilayer Thin Films

  • W. J. Meng (a1), G. L. Eesley (a1), K. Svinarich (a2) and G. P. Meisner (a1)

Abstract

We have investigated structural and elastic properties of Hf/Zr multilayer thin films by x-ray diffraction and transient piezoreflectance measurements. Similar structural and elastic behaviors have been observed in two series of samples grown at different deposition rates (1 – 10Å/sec). Our measurements suggest different (˜ 10%) effective elastic constants between multilayers with coherent and incoherent interfaces.

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Structural and Elastic Properties of HF/ZR Multilayer Thin Films

  • W. J. Meng (a1), G. L. Eesley (a1), K. Svinarich (a2) and G. P. Meisner (a1)

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