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Strong Deviation Of The Lattice Parameter In Si1-x-y Ge x C y Epilayers From Vegard's Rule

  • J. Stangl (a1), S. Zerlauth (a1), F. Schäffler (a1), G. Bauer (a1), M. Berti (a2), D. De Salvador (a2), A. V. Drigo (a2) and F. Romanato (a2)...

Abstract

From the comparison of precise determinations of the Ge and C contents of a series of Si1-x-y Ge x C y epilayer samples (x < 0.18, y < 0.02) by Rutherford and resonant backscattering experiments and x-ray diffraction, the variation of the Si1-x-y Ge x C y lattice spacing as a function of C content is determined. A significant negative deviation from Vegard's rule is observed, in agreement with theoretical predictions by Kelires.

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Strong Deviation Of The Lattice Parameter In Si1-x-y Ge x C y Epilayers From Vegard's Rule

  • J. Stangl (a1), S. Zerlauth (a1), F. Schäffler (a1), G. Bauer (a1), M. Berti (a2), D. De Salvador (a2), A. V. Drigo (a2) and F. Romanato (a2)...

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