Skip to main content Accessibility help
×
Home

Stresses and Adhesion of Thin Polycrystalline 3C SiC Films Grown by CVD on Silicon Substrates

  • L.M. Ivanova (a1), V.V. Kovalenko (a1) and T.M. Tkacheva (a1)

Abstract

SiC thin films less than 1 μm thick are grown by thermal decomposition of CH3SiC13 in a hydrogen atmosphere in an open CVD system. The interface stress is shown to be depend on the growth conditions. The optimal conditions for the preparation of uniform SiC films have been determined. Thermal annealing of the films has also been studied, and the conditions that provide for relaxation of the interface stresses are determined.

Copyright

References

Hide All
1 Miyajima, T., Saski, K., Furukawa, S.. Proc. ICACSC '91 (4th International Conference on Amorphous Crystalline Silicon Carbide and Others IV-IV Materials) Santa Clara, 1991
2 Shimizu, H., Naito, K., Ishio, S.. Proc. ICACSC '91 (4th International Conference on Amorphous Crystalline Silicon Carbide and Others IV-IV Materials) Santa Clara, 1991
3 Rahman, M.M., Yang, C.Y.-W., Harris, G.L., eds. Amorphous and Crystalline Silcon Carbide II by Fukazawa, T., Sasaki, K., Furukawa, S.. (2nd Int. Conf. Proc., Santa Clara, 1988) 49.
4. Rahman, M.M., Yang, C.Y.-W., Harris, G.L., eds. Amorphous and Crystalline Silcon Carbide II by Chinone, Y., Ezaki, S., Fujita, F., Matsumoto, K.. (2nd Int. Conf. Proc., Santa Clara, 1988) 198.
5 Rahman, M.M., Yang, C.Y.-W., Harris, G.L., eds. Amorphous and Crystalline Silcon Carbide II by Nishikuni, M., Dohjoh, H., Ninomiya, K. et al. (2nd Int. Conf. Proc., Santa Clara, 1988) 54.
6 Koike, K., Ono, H., Homma, T. et al. Proc. ICACSC '91 (4th International Conference on Amorphous Crystalline Silicon Carbide and Others IV-IV Materials) Santa Clara, V. 10, (1991).
7 Ivanova, L.M. andPletushkin, A.A.. Growth of Policrystalline SiC by Thermal Decomposition of MeSiCl (Poluchenie polikristallicheskogo karbida kremniya termicheskim raziozeniem metiltrikhlorsilana) Kiev, Naukova, Dumka, 151 (1966).
8 Novikova, S.N.. Thermal Expansion of Solids (Teplovoe rasshiremie tverdykh tel) Hauka, Moscow, 228 (1974).
9 Gorin, S.N. andPletushkin, A.A.. Crystal Growth (Rost kristallov) Nauka, Moscow, 1965 V. 6, p. 210.

Stresses and Adhesion of Thin Polycrystalline 3C SiC Films Grown by CVD on Silicon Substrates

  • L.M. Ivanova (a1), V.V. Kovalenko (a1) and T.M. Tkacheva (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed