Crossref Citations
This article has been cited by the following publications. This list is generated based on data provided by
Crossref.
Bühler, J
Steiner, F-P
and
Baltes, H
1997.
Silicon dioxide sacrificial layer etching in surface micromachining.
Journal of Micromechanics and Microengineering,
Vol. 7,
Issue. 1,
p.
R1.
Liwei Lin
Howe, R.T.
and
Pisano, A.P.
1998.
Microelectromechanical filters for signal processing.
Journal of Microelectromechanical Systems,
Vol. 7,
Issue. 3,
p.
286.
Bustillo, J.M.
Howe, R.T.
and
Muller, R.S.
1998.
Surface micromachining for microelectromechanical systems.
Proceedings of the IEEE,
Vol. 86,
Issue. 8,
p.
1552.
Lebouitz, K.S.
Mazaheri, A.
Howe, R.T.
and
Pisano, A.P.
1999.
Vacuum encapsulation of resonant devices using permeable polysilicon.
p.
470.
Kageyama, Y.
Tsuchiya, T.
Funabashi, H.
and
Sakata, J.
2000.
Polycrystalline silicon thin films with hydrofluoric acid permeability for underlying oxide etching and vacuum encapsulation.
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films,
Vol. 18,
Issue. 4,
p.
1853.
Kageyama, Yasuyuki
Murase, Yoshie
Tsuchiya, Toshiyuki
Funabashi, Hirofumi
and
Sakata, Jiro
2002.
Formation of porous grain boundaries in polycrystalline silicon thin films.
Journal of Applied Physics,
Vol. 91,
Issue. 11,
p.
9408.
Dougherty, G.M.
Sands, T.D.
and
Pisano, A.P.
2003.
Microfabrication using one-step LPCVD porous polysilicon films.
Journal of Microelectromechanical Systems,
Vol. 12,
Issue. 4,
p.
418.
Miller, David C.
Gall, Ken
and
Stoldt, Conrad R.
2005.
Galvanic Corrosion of Miniaturized Polysilicon Structures.
Electrochemical and Solid-State Letters,
Vol. 8,
Issue. 9,
p.
G223.
Miller, David C.
Gall, Ken
and
Stoldt, Conrad R.
2005.
Mechanical Effects of Galvanic Corrosion of Thin Film Polysilicon.
p.
325.
Miller, David C.
Hughes, William L.
Wang, Zhong-Lin
Gall, Ken
and
Stoldt, Conrad R.
2007.
Mechanical Effects of Galvanic Corrosion on Structural Polysilicon.
Journal of Microelectromechanical Systems,
Vol. 16,
Issue. 1,
p.
87.
Kang, Tsung-Kuei
Chen, Wei-Hao
Liu, Han-Wen
Chien, Feng-Tso
Lin, Cheng-Li
and
Wang, Fang-Hsing
2017.
Clean-Induced Instability of Electrical Characteristics in Poly-Si Junctionless Nanowire Transistor.
ECS Journal of Solid State Science and Technology,
Vol. 6,
Issue. 7,
p.
N83.
Seidler, Paul
2017.
Optimized process for fabrication of free-standing silicon nanophotonic devices.
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena,
Vol. 35,
Issue. 3,
Madani, Keeya
Rohatgi, Ajeet
Rounsaville, Brian
Kang, Min-Gu
Song, Hee-Eun
and
Ok, Young-Woo
2021.
Enhanced Stability of Exposed PECVD Grown Thin n
+ Poly-Si/SiO
x
Passivating Contacts With Al2O3 Capping Layer During High Temperature Firing.
IEEE Journal of Photovoltaics,
Vol. 11,
Issue. 2,
p.
268.