Skip to main content Accessibility help

Stress and Microstructure Evolution during the Deposition and Crystallization of DCMagnetron Sputter Deposited Amorphous ITO

  • Hyo-Young Yeom (a1), Courtney Lanier (a1), Eric Chason (a1) and David C. Paine (a1)


The deposition of ITO onto glass substrates at room temperature results in a metastable amorphous phase that undergoes crystallization at remarkably low homologous temperatures (T/Tm<0.2). We have evaluated ITO film stress in the as-deposited condition and during crystallization of 200 nm thick films isothermally heated at 250°C. To explore the effect of stoichiometry on the amorphous structure, ITO films were deposited under low, optimum, and high (0, 0.1, and 2 vol %, respectively) oxygen partial pressures. In this report we have correlated changes in stress with changes in the electron transport characteristics (hall mobility and carrier density) and film microstructure.



Hide All
1. Ishibashi, S., Higuchi, Y., Ota, Y. and Nakamura, K., J. Vac. Sci. Technol. A8(3), 1403 (1990).
2. Higuchi, Masatoshi, Uekusa, Shinichiro, Nakano, Ryotaro and Yokogawa, Kazuhiko, J. Appl. Phys., 74(11), 6710 (1993).
3. Shin, S.H., Shin, J.H., Park, K.J., Ishida, T. Tabata, O. and Kim, H.H., Thin Solid Films, 341, 225 (1999).
4. May, C. and Strumpfel, J., Thin Solid Films, 351, 48 (1999).
5. Shigesato, Y., Koshi-ishi, R., Kawashima, T., and Ohsako, J., Vaccum 59, 614(2000)
6. Salehi, A., Thin Solid Films, 324 214 (1998).
7. Bhagwat, S., Howson, R.P., Surface Coatings Technology, 111, 163 (1999).
8. Meng, Li-jian, Santos, M.P.dos, Applied Surface Science, 120, 243 (1997).
9. Meng, Li-jian, Santos, M.P. dos, Thin Solid Films, 322, 56 (1998).
10. Morikawa, Hiroshi, Fujita, Miya, Thin Solid Films, 359, 61 (2000).
11. Vink, T.J., Walrave, W., Daams, J.L.C., Baarslag, P.C., Meeraker, J.E.A.M. van den, Thin Solid Films, 266, 145 (1995).


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed