Hostname: page-component-8448b6f56d-tj2md Total loading time: 0 Render date: 2024-04-16T22:20:07.368Z Has data issue: false hasContentIssue false

Strategies for CMOS Low Equivalent Oxide Thickness Achievement with High-κ Oxides Grown on Si(001) by MBE

Published online by Cambridge University Press:  01 February 2011

Loic Becerra
Affiliation:
loic.becerra@ec-lyon.fr, UMR CNRS 5270, INL, Ecole Centrale de Lyon - Bât. F7, 36 Avenue Guy de Collongue, Ecully, 69134, France
Clément Merckling
Affiliation:
mercklin@imec.be, UMR CNRS 5270, INL, Ecole Centrale de Lyon - Bât. F7, 36 Avenue Guy de Collongue, Ecully, 69134, France
Nicolas Baboux
Affiliation:
nicolas.baboux@insa-lyon.fr, UMR CNRS 5270, INL, INSA de Lyon - Bât. B. Pascal, 7 Avenue Jean Capelle, Villeurbanne, 69621, France
Mario El-Kazzi
Affiliation:
Mario.kazzi@ec-lyon.fr, UMR CNRS 5270, INL, Ecole Centrale de Lyon - Bât. F7, 36 Avenue Guy de Collongue, Ecully, 69134, France
Guillaume Saint-Girons
Affiliation:
guillaume.saint-girons@ec-lyon.fr, UMR CNRS 5270, INL, Ecole Centrale de Lyon - Bât. F7, 36 Avenue Guy de Collongue, Ecully, 69134, France
Bertrand Vilquin
Affiliation:
bertrand.vilquin@ec-lyon.fr, UMR CNRS 5270, INL, Ecole Centrale de Lyon - Bât. F7, 36 Avenue Guy de Collongue, Ecully, 69134, France
Carole Plossu
Affiliation:
carole.plossu@insa-lyon.fr, UMR CNRS 5270, INL, INSA de Lyon - Bât. B. Pascal, 7 Avenue Jean Capelle, Villeurbanne, 69621, France
Guy Hollinger
Affiliation:
Guy.Hollinger@ec-lyon.fr, UMR CNRS 5270, INL, Ecole Centrale de Lyon - Bât. F7, 36 Avenue Guy de Collongue, Ecully, 69134, France
Get access

Abstract

Amorphous LaAlO3 high-k oxide was grown in a molecular beam epitaxy reactor on p-Si(001) using a thin γ-Al2O3 epitaxied buffer layer. Interfaces were free of SiO2 or silicates and remained abrupt despite the high temperature used for annealing, as X-ray photoelectron spectroscopy showed. Electrical measurements performed on as-deposited samples revealed a dielectric constant value close to that of the bulk, small equivalent oxide thickness and low density of interface states. But some negative charges were present, leading to a flat band voltage shift. Post deposition annealing with forming gas can correct this effect.

Type
Research Article
Copyright
Copyright © Materials Research Society 2008

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.The International Technology Roadmap for Semiconductors 2007, http://www.itrs.netGoogle Scholar
2.http://www.intel.com/pressroom/kits/45nm/index.htmGoogle Scholar
3. Becerra, L. Merckling, C. Baboux, N. Plossu, C. Marty, O. El-Kazzi, M., Saint-Girons, G., Vilquin, B. and Hollinger, G. Appl. Phys. Lett. 91, 192909 (2007)Google Scholar
4. Yan, L. Lu, H.B. Tan, G.T. Chen, F. Zhou, Y.L. Yang, G.Z. Liu, W. and Chen, Z.H. Appl. Phys. A 77, 721 (2003)Google Scholar
5. Robertson, J. Rep. Prog. Phys. 69, 327 (2006)Google Scholar
6. Lu, X.B. Zhang, X. Huang, R. Lu, H.B. Chen, Z.H. Xiang, W.F. He, M. Cheng, B.L. Zhou, H.W., Wang, X.P. Wang, C.Z. and Nguyen, B.Y. Appl. Phys. Lett. 84, 2620 (2004)Google Scholar
7. Yan, L. Kong, L.B. and Ong, C.K. Semicond. Sci. Technol. 19, 935 (2004)Google Scholar
8. Merckling, C. El-Kazzi, M., Delhaye, G. Gendry, M. Saint-Girons, G., Hollinger, G. Largeau, L. and Patriarche, G. Appl. Phys. Lett. 89, 232907 (2006)Google Scholar
9. Merckling, C. El-Kazzi, M., Becerra, L. Largeau, L. Patriarche, G. Saint-Girons, G. and Hollinger, G., Microelec. Eng. 84, 2243 (2007)Google Scholar
10. Busseret, C. Baboux, N. Plossu, C. and Poncet, A. Proc. of SISPAD, 188 (2006)Google Scholar
11. Palestri, P. Barin, N. Brunel, D. Busseret, C. Campera, A. Childs, P.A. Driussi, F. Fiegna, C. Fiori, G. Gusmeroli, R. Iannaccone, G. Karner, M. Kosina, H. Lacaita, A.L. Langer, E. Majkusiak, B., Compagnoni, C. Monzio, Poncet, A. Sangiorgi, S. Selmi, L. Spinelli, A.S. and Walczak, J., IEEE Transaction on Electron Devices 54, 106 (2007)Google Scholar
12. Castagné, R. and Vapaille, A. Surface Science 28, 157 (1971)Google Scholar
13. Lee, J.H. Koh, K. Lee, N.I. Cho, M.H. Y.K.Kim, Jeon, J.S. Cho, K.H. Shin, H.S. Kim, M.H. Fujihara, K. Kang, H.K. and Moon, J.T. IEEE Int. Electron Devices Meeting, 645 (2000)Google Scholar