Skip to main content Accessibility help

A Stable n-Channel Indium Phosphide Field-Effect Transistor with an Amorphous Hydrogenated Silicon Gate

  • E. Roditi (a1), A.A. Iliadis (a2) and A. Christou (a3)


InP field-effect transistors fabricated with an amorphous hydrogenated Si (a-Si:H) gate resulted in metal-insulator-like FET characteristics with no observable current drift and a transconductance of 30–38 mS/mm. The high stability of this gate system is attributed to the low temperature of deposition and the hydrogen passivation of the InP surface.



Hide All
1 Itoh, T. and Ohata, K., IEEE Trans. Electron Devices ED–30, 811 (1983).
2 Tell, B., Liao, A.S.H., Brown-Goebler, K.F., Bridges, T.J., Buzkhaidt, G., Chang, T.Y., and Bergano, N.S., IEEE Trans. Electron Devices ED–32, 2319 (1985).
3 Kulisch, W., Rombach, R. and Kassing, R., Appl. Surf. Sci. 30, 89 (1987).
4 Takahashi, S., Nakada, T., Kamimuza, K., Zama, H., Hattori, T. and Kunioka, A., Jpn. J. Appl. Phys. 26, L1606 (1987).
5 Fathimulla, M., Loughran, T., Stecker, L., Hemplfling, E., Mattingly, M. and Aina, O., IEEE Elect. Dev. Let. 9, 223 (1988).
6 Hanson, C.M., Chu, P., Wieder, H.H. and Clawson, A.R., IEEE Elec. Dev. Let. EDL–8, 53 (1987).
7 Wager, J., Owen, S.J.T. and Pzasad, S.J., J. Electrochem. Soc. 134, 160 (1987).
8 Iwase, Y., Aral, I. and Sugano, T., Appl. Phys. Lett. 52, 1437 (1988).
9 Loualiche, S., Vaudry, C., Henry, L. and LeCorre, A., Electron. Lett. 22, 896 (1986).
10 Pankove, J. and Tarng, M.L., Appl. Phys. Lett. 34, 156 (1979).
11 Johnon, J., Forrest, S.R., Zeisse, C.R. and Nguyen, R., Appl. Phys. Lett. 52, 495 (1988).
12 Boher, P., Renaud, M., Lopez-Villegas, J.M., Schneider, J. and Chane, J.P., Appl. Surf. Sci. 30, 100 (1987).
13 Shayer, W., Mackie, W. and Swanson, L.W., Surf. Sci. 34, 225 (1973).


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed