Skip to main content Accessibility help

Sputter Deposition of GMR Spin Valves

  • W. Zou (a1), X.W. Zhou (a1), J.J. Quan (a1), Y.G. Yang (a1), H.N.G. Wadley (a1), D. Brownell (a2), D. Wang (a2), S. Ghosal (a3), D. Subhas (a3), Robert Kosut (a3) and Jon Ebert (a3)...


Radio frequency (RF) diode sputtering has been used for the growth of giant magnetoresistive (GMR) metal multilayers. Control of the atomic-scale structure of the surfaces and interfaces within these films is critical for GMR applications. A systematic series of experiments have been conducted to evaluate the dependence of the magnetotransport properties upon the growth conditions (i.e. background pressure, input power) for NiFeCo/CoFe/CuAgAu spin valves during RF diode sputter deposition. By using computational fluid dynamics, plasma, molecular dynamics, and various Monte Carlo techniques, a multiscale modeling approach has investigated the atomic assembly events during film growth. Energetic metal atoms and inert gas ion fluxes are shown to have very strong effects upon interfacial structures. The insights gained have led to novel deposition strategy propopositions for interface morphology control.



Hide All
1 Levy, P. M., J. Magn. Magn. Mater., 140–144, 485(1995).10.1016/0304-8853(94)00587-7
2 Stiles, M. D., Phys. Rev., B48, 7238(1993).10.1103/PhysRevB.48.7238
3 Butler, W. H., Zhang, X. G., Nicholson, D. M. C. and MacLaren, J. M., Phys. Rev., 52B, 13399(1995).10.1103/PhysRevB.52.13399
4 Daughton, J., Brown, J., Chen, E., Beech, R., Pohm, A. and Kude, W., IEEE Trans. Magn., 30, 4608(1994).10.1109/20.334164
5 Baibich, M. N., Broto, J. M., Fert, A., Dau, F. N. V., Petroff, F., Eitenne, P., Creuzet, G., Friederich, A. and Chazelas, J., Phys. Rev. Lett. 61, 2472(1988).10.1103/PhysRevLett.61.2472
6 Binasch, G., Grunberg, P., Saurenbach, F. and Zinn, W., Phys. Rev. B39, 4828(1989).10.1103/PhysRevB.39.4828
7 Prinz, G. A., Science 282, 1660(1998).10.1126/science.282.5394.1660
8 Desa, S., Ghosal, S., Kosut, R. et al., J.Vac. Sci. Technol, A 17(4), Jul/Aug 1926 (1999).10.1116/1.581705
9 Zou, W. Master Thesis 9RF Diode Sputter Deposition of Copper”, University of Virginia (May, 1999).
10 Zhou, X. W., Subha, S., Wadley, Haydn N.G., in preparation.
11 Zhou, X. W. and Wadley, H. N. G, J. Appl. Phys. 84, 2301(1998).10.1063/1.368297
12 Zhou, X. W. and Wadley, H. N. G., J. Appl. Phys. 87, 553(2000).10.1063/1.371899
13 Johnson, R. E., in Energetic Charged-Particle Interactions with Atmospheres and Surfaces, Physics and Chemistry in Space Planetology, Vol. 19, ed. Lanzerotti, L. J., Hill, M. and Stoffler, D., Springer-Verlag, Berlin, p. 68, 1990.10.1007/978-3-642-48375-2
14 Yang, Y.G. Ph.D. Thesis, University of Virginia, 2000.

Sputter Deposition of GMR Spin Valves

  • W. Zou (a1), X.W. Zhou (a1), J.J. Quan (a1), Y.G. Yang (a1), H.N.G. Wadley (a1), D. Brownell (a2), D. Wang (a2), S. Ghosal (a3), D. Subhas (a3), Robert Kosut (a3) and Jon Ebert (a3)...


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed