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Spectroscopy of Transition-Metal-Hydrogen Complexes in Silicon

Published online by Cambridge University Press:  26 February 2011

Michael Stavola ,
S.J. Uftring ,
M.J. Evans ,
P.M. Williams  and
G.D. Watkins
Michael Stavola
Affiliation:
Department of Physics, Lehigh University, Bethlehem, Pennsylvania 18015
S.J. Uftring
Affiliation:
Department of Physics, Lehigh University, Bethlehem, Pennsylvania 18015
M.J. Evans
Affiliation:
Department of Physics, Lehigh University, Bethlehem, Pennsylvania 18015
P.M. Williams
Affiliation:
Department of Physics, Lehigh University, Bethlehem, Pennsylvania 18015
G.D. Watkins
Affiliation:
Department of Physics, Lehigh University, Bethlehem, Pennsylvania 18015
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Abstract

Transition-metal-hydrogen complexes have been introduced into bulk Si samples that contained Pt, Au, or Rh by the indiffusion of hydrogen at 1250°C from H2 gas. The structure and electrical properties of a PtH2 complex in Si have been studied by vibrational spectroscopy and electron paramagnetic resonance (EPR). The PtH2 complex has been found to introduce two levels in the Si bandgap. There is one paramagnetic charge state for which EPR provides detailed structural information and two nonparamagnetic charge states. The hydrogen vibrations of all three charge states of PtH2 have been assigned. In addition to the PtH2 complex, the hydrogen vibrations of several additional complexes in Si samples that contain hydrogen and Pt, Au, or Rh have been identified.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 378: Symposium B – Defect and Impurity-Engineered Semiconductors and Devices , 1995 , 341
Copyright
Copyright © Materials Research Society 1995

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