Skip to main content Accessibility help
×
Home

Spectroscopic Ellipsometry as a Potential In-Line Optical Metrology Tool For Relative Porosity Measurements of Low- K Dielectric Films

  • N.V. Edwards (a1), J. Vella (a1), Q. Xie (a1), S. Zollner (a1), D. Werho (a1), I. Adhihetty (a1), R. Liu (a1), T.E. Tiwald (a2), C. Russell (a3), J. Vires (a4) and K.H. Junker (a4)...

Abstract

The optical properties of organosilicate glass (OSG) samples were investigated with spectroscopic ellipsometry. We found that samples with dramatically higher hardness had higher indices of refraction (RI) and thus higher electron densities and lower relative porosities than films with lower hardnesses. The reverse was true for films with low hardnesses. As well, these films did not have the same optical properties as porous SiO2 across the spectral range measured, which we show has significant implications for the in-line optical metrology of these materials.

Copyright

References

Hide All
1.SIA Roadmap, 1998.
2. Aspnes, D. E., Thin Solid Films 89, 249 (1982).
3. Oliver, W. C. and Pharr, G. M., J. Mater. Res. 7, 1564 (1992).
4. Vella, J., Xie, Q., Edwards, N.V., Kulik, J. and Junker, K., in accompanying paper in Symposium L (Paper 6.25).
5. Aspnes, D. E. and Studna, A. A., Phys. Rev. B 27, 985 (1983).
6. Bruggeman, D. A. G., Ann. Phys. (Leipzig) 24, 636 (1935).
7. Jellison, G.E. and Modine, F. A., Appl. Phys. Lett. 69, 371 (1996).
8. Jellison, G. E., Physics of Optical Metrology of Silicon-based Semiconductor Devices

Spectroscopic Ellipsometry as a Potential In-Line Optical Metrology Tool For Relative Porosity Measurements of Low- K Dielectric Films

  • N.V. Edwards (a1), J. Vella (a1), Q. Xie (a1), S. Zollner (a1), D. Werho (a1), I. Adhihetty (a1), R. Liu (a1), T.E. Tiwald (a2), C. Russell (a3), J. Vires (a4) and K.H. Junker (a4)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed