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Spectral-Component Monitoring of the Plumes Generated during the Deposition of RE(Y, Nd) Ba2Cu3O7−x Films by Pulsed Laser Ablation

Published online by Cambridge University Press:  10 February 2011

R. Biggers ,
C. Varanasi ,
I. Maartense ,
D. Dempsey ,
D. Mastc ,
D. Liptak ,
J. Jones ,
T. L. Peterson ,
T. Murray  and
J. Busbee
R. Biggers
Affiliation:
Materials and Manufacturing Directorate
C. Varanasi
Affiliation:
Propulsion Directorate, Air Force Research Laboratory, Wright-Patterson AFB, OH 45433-7707
I. Maartense
Affiliation:
Materials and Manufacturing Directorate
D. Dempsey
Affiliation:
Materials and Manufacturing Directorate
D. Mastc
Affiliation:
Department of Physics, University of Cincinnati, Cincinnati OH
D. Liptak
Affiliation:
Materials and Manufacturing Directorate
J. Jones
Affiliation:
Materials and Manufacturing Directorate
T. L. Peterson
Affiliation:
Materials and Manufacturing Directorate
T. Murray
Affiliation:
University of Dayton Research Institute, Dayton OH
J. Busbee
Affiliation:
Materials and Manufacturing Directorate
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Abstract

Yba2Cu3OT7−x (Y123) and NdBa2Cu3O7−x (Nd123) thin films were deposited by PLD using a 248 nm wavelength KrF excimer laser. The emission spectra PLD process control techniques developed to grow reproducibly high quality Y123 thin films were also applied to the Nd123 depositions. The time-resolved spectral components of plumes generated from Y123 and Nd123 targets at the same deposition conditions were compared. When the two targets were mounted at the same distance from the substrate heater, the spectral emissions at 327 ± 5 nm (Cu*) were essentially identical for similar laser pulse energies and other deposition conditions (150 mTorr oxygen pressure, 760°C substrate heater temperatures, etc.). High quality Nd 123 films (Tc ˜93 K, Jc > 2x 106 A/cm2) are considerably more difficult to produce than those of Y123. Deposition conditions associated with PLD of high quality Y123 films produce very poor Nd 123 films. This observation is consistent with the belief that the nucleation and growth of Nd 123 are significantly different than that of Y 123.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 502: Symposium II – In Situ Process Diagnostics & Intelligent Materials Processing , 1997 , 215
Copyright
Copyright © Materials Research Society 1998

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References

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