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Spatially Resolved Compositional Analysis of a BCN Thin Film Grown on a Ni Substrate by Chemical Vapor Deposition

Published online by Cambridge University Press:  25 May 2012

Satoru Suzuki  and
Hiroki Hibino
Satoru Suzuki
Affiliation:
NTT Basic Research Laboratories, NTT Corporation, Atsugi, Kanagawa 243-0198, Japan
Hiroki Hibino
Affiliation:
NTT Basic Research Laboratories, NTT Corporation, Atsugi, Kanagawa 243-0198, Japan
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Abstract

A thin film consisting of boron, carbon, and nitrogen (BCN) was grown on a polycrystalline Ni substrate by thermal chemical vapor deposition. The local elemental composition of the BCN film was analyzed by scanning Auger electron spectroscopy. The film is elementally highly inhomogeneous and consists of domains with a typical size of 1-10 μm and irregular shapes. The domain structure is strongly related to the structure of the grains of the polycrystalline Ni film beneath the domain. A thick domain is often formed on a small Ni grain. On a large and flat Ni grain, the film thickness is relatively small, and both the boron and nitrogen contents are often below the detection limit, indicating that it is a graphene domain. Boron and nitrogen contents are highly correlated, which is consistent with formation of hexagonal boron nitride. However, unbalanced boron and nitrogen contents are observed from thick domains.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1451: Symposium DD/EE – Nanocarbon Materials and Devices , 2012 , pp. 151 - 156
Copyright
Copyright © Materials Research Society 2012

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References

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