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Spatial and Temporal Analysis of Microplasma Light Emission

  • M. Blajan (a1), H. Fukunaga (a1) and K. Shimizu (a1)

Abstract

Emission spectroscopy analysis was used to study the microplasma phenomena. The microplasma discharge in Ar, N2/Ar and O2/Ar was analyzed in the discharge gap area and spatial distribution of active species was measured also outside the electrodes. Spatial and temporal distribution showed the propagation of light emission from anode towards cathode within a time period of 190 ns. The measurement of OH peak at 308.9 nm proved the existence of this excited species 1 mm outside the electrodes area.

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Keywords

Spatial and Temporal Analysis of Microplasma Light Emission

  • M. Blajan (a1), H. Fukunaga (a1) and K. Shimizu (a1)

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