Skip to main content Accessibility help
×
Home

Source-drain Engineering for Channel-limited PMOS Device Performance: Advances in Understanding of Amorphization-Based Implant Techniques

  • Nick E. Cowern (a1)

Abstract

This paper discusses the role of amorphisation and residual end-of-range defects in p-channel source/drain engineering. A comparison between preamorphisation and molecular implant approaches shows up some important common features of electrical activation, diffusion, and junction leakage, related to the formation and location of boron-interstitial and self-interstitial clusters. The success of these techniques depends on confining ‘end-of-range’ defects – whether TEM-visible defects or sub-microscopic clusters – within the narrow region between the boron implant peak and the source-drain/halo depletion region. This observation points to significant improvements that can still be made in implantation processing for ultrashallow junctions.

Copyright

References

Hide All
1. Current, M.I., Felch, S., Kuroi, T., Jain, A., Timans, P., Jacobson, D., and Hautala, J., in Ion Implantation Science and Technology, 2008 Edition, edited by Ziegler, J.F., Ion Implantation Technology Press, June 2008
2. Current, M.I., Faifer, V., Halim, J., and Ohno, N., Proc. Int. Workshop on Junction Technology, 2007
3. Borland, J., Proc. Int. Workshop on Junction Technology, 2006
4. Sharp, J.A., Cowern, N.E.B, Smith, A.J, Webb, R.P, Kirkby, K.J, Giubertoni, D., Gennaro, S., Bersani, M., Foad, M.A., Fazzini, P.F., and Cristiano, F., Appl. Phys. Lett. 92, 082109 (2008)
5. Claverie, A., Colombeau, B., Mauduit, B. de, Bonafos, C., Hebras, X., Assayag, G. Ben and Cristiano, F., Appl. Phys. A 76, 1025 (2003)
7. Liu, X.-Y., Windl, W., and Masquelier, M.P., Appl. Phys. Lett. 77, 2018 (2000)
8. Felch, S., private communication

Keywords

Related content

Powered by UNSILO

Source-drain Engineering for Channel-limited PMOS Device Performance: Advances in Understanding of Amorphization-Based Implant Techniques

  • Nick E. Cowern (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed.