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Solid Solution Alloy Effects on Microstructure and Indentation Hardness in Pt-Ru Thin Films

  • Seungmin Hyun (a1), Oliver Kraft (a2) and Richard P. Vinci (a1)

Abstract

The elastic moduli and flow stresses of as-deposited Pt and Pt-Ru solid solution thin films were investigated by the nanoindentation method. The influence of solid solution alloying was explored by depositing Pt-Ru solid solution thin films with various compositions onto Si substrates. The 200 nm films were prepared by DC magnetron cosputtering with a Ru composition range from 0 to 20wt%. As expected, the modulus and the flow stress both increased significantly with an increase in Ru. The experimental results compare favorably to predictions based on a simple dislocation motion model consisting of three strengthening terms: substrate constraint, grain size strengthening and solid solution strengthening.

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1. Metals Handbook, 'Properties and Selection; Nonferrous alloys and special purpose materials, 2, 707 (1990).
2. Binary Alloy Phase Diagrams, ed. Massalski, T.B., 2nd edition, ASM International (1992).
3. Vinci, R.P., Zielinski, E.M., and Bravman, J.C., Mat.Res.Soc.Symc.Proc., 356, 459 (1995).
4. Venkatraman, R. and Bravman, J.C, J.Mater.Res., 7, 2040 (1992).
5. Oliver, W.C. and Pharr, G.M., J.Mater.Res., 7, 1564 (1992).
6. Grimvall, G., Thermophysical Properties of Materials, North-Holland (1986).
7. Bahr, D.F., Crowson, D.A., Robach, J.S. and Gerberich, W.W., Mat. Res. Soc. Symp. Proc. 505, 85 (1997).
8. Tabor, D., The Hardness of Metals, Oxford at the Clarendon Press (1951)
9. Nix, W.D., Metal. Trans.A. 20A, 2217 (1989).
10. Freun, L.B.d, J.Appl. Mech. 54, 553 (1987).
11. Sevillano, J.G., Materials Science and Technology, Vol6, ed. Mughrabi, H., VCH (1993).
12. Labusch, R., Phys., Stat., Sol., 41, 659 (1970)
13. Haasen, Peter, Physical Metallurgy, Cambridge Univ.Press (1996)

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