Skip to main content Accessibility help
×
Home

SOLID PHASE EPITAXIAL GROWTH OF Ge ON GaAs

  • C.J. Palmstrom (a1), G.J. Galvin (a2), S.A. Schwarz (a3), B.C. De Cooman (a2) and J.W. Mayer (a2)...

Abstract

Solid phase epitaxial growth of electron beam evaporated Ge layers on unheated GaAs has been demonstrated. The amorphous Ge layers grow epitaxially on the GaAs surface during anneals at 400°C. A technique for growing these epitaxial layers without the need for in-situ heat treatment of the GaAs prior to Ge deposition is described.

Copyright

References

Hide All
1. Stall, R., Wood, C.E.C., Board, K., and Eastman, L.F., Electron. Lett. J1, 800 (1979).
2. Devlin, W.J., Wood, C.E.C., Stall, R. and Eastman, L.F., Solid-State Electronics 23,823 (1980).
3. Anderson, W.T., Christou, A., and J.E. Davey,J. Appl. Phys. -4, 2998 (1978).
4. Tseng, W.F., Davey, J.E., Christou, A., and Wilkens, B.R., Appl. Phys. Lett. 36, 435 (1980).
5. Stall, R.A., Wood, C.E.C., Board, K., Dandekar, N., Eastman, L.F., and Devlin, J., J. Appl. Phys. 5Z,4062 (1981).
6. Csepregi, L., KUllen, R.P., and Mayer, J.W., Solid State Communications 21, 1019 (1977).
7. Grimaldi, M.G., M&enpa&, M., Paine, B.M., Nicolet, M.-A., Lau, S.S., and Tseng, W.F., J. Appl. Phys. 52, 1351 (1981).
8. Palmstrom, C.J., presented at 9th. Symp. on Ion Sources and Ion-Assisted Technology, (Tokyo,1985).
9. Marshall, E.D., Wu, C.S., Scott, D.M., Lau, S.S., and Kuech, T.F., in Thin Films and Interfaces II, edited by Baglin, J.E.E., Campbell, D.R., and W.K. Chu (North Holland, New York, 1984), p. 63.
10.T. de Jong, Saris, F.W., Tamminga, Y., and Haisma, J., Appl. Phys. Lett. 28, 445 (1984).
11. Palmstrom, C.J. and Galvin, G.J., Appl. Phys. Lett. 47, 815 (1985).
12. Williams, J.S. and Austin, M.W., Appl. Phys. Lett. 36, 994 (1980).
13.Y.-K. Wang and Holloway, P.H., J. Vac. Sci. Technol. B2, 613 (1984).

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed