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  • C.J. Palmstrom (a1), G.J. Galvin (a2), S.A. Schwarz (a3), B.C. De Cooman (a2) and J.W. Mayer (a2)...


Solid phase epitaxial growth of electron beam evaporated Ge layers on unheated GaAs has been demonstrated. The amorphous Ge layers grow epitaxially on the GaAs surface during anneals at 400°C. A technique for growing these epitaxial layers without the need for in-situ heat treatment of the GaAs prior to Ge deposition is described.



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1. Stall, R., Wood, C.E.C., Board, K., and Eastman, L.F., Electron. Lett. J1, 800 (1979).
2. Devlin, W.J., Wood, C.E.C., Stall, R. and Eastman, L.F., Solid-State Electronics 23,823 (1980).
3. Anderson, W.T., Christou, A., and J.E. Davey,J. Appl. Phys. -4, 2998 (1978).
4. Tseng, W.F., Davey, J.E., Christou, A., and Wilkens, B.R., Appl. Phys. Lett. 36, 435 (1980).
5. Stall, R.A., Wood, C.E.C., Board, K., Dandekar, N., Eastman, L.F., and Devlin, J., J. Appl. Phys. 5Z,4062 (1981).
6. Csepregi, L., KUllen, R.P., and Mayer, J.W., Solid State Communications 21, 1019 (1977).
7. Grimaldi, M.G., M&enpa&, M., Paine, B.M., Nicolet, M.-A., Lau, S.S., and Tseng, W.F., J. Appl. Phys. 52, 1351 (1981).
8. Palmstrom, C.J., presented at 9th. Symp. on Ion Sources and Ion-Assisted Technology, (Tokyo,1985).
9. Marshall, E.D., Wu, C.S., Scott, D.M., Lau, S.S., and Kuech, T.F., in Thin Films and Interfaces II, edited by Baglin, J.E.E., Campbell, D.R., and W.K. Chu (North Holland, New York, 1984), p. 63.
10.T. de Jong, Saris, F.W., Tamminga, Y., and Haisma, J., Appl. Phys. Lett. 28, 445 (1984).
11. Palmstrom, C.J. and Galvin, G.J., Appl. Phys. Lett. 47, 815 (1985).
12. Williams, J.S. and Austin, M.W., Appl. Phys. Lett. 36, 994 (1980).
13.Y.-K. Wang and Holloway, P.H., J. Vac. Sci. Technol. B2, 613 (1984).


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