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Smart Ferroelectric Films and Fibers; Applications in Micromechanics

Published online by Cambridge University Press:  15 February 2011

Keith G. Brooks ,
K. R. Udayakumar ,
Jiayu Chen ,
Ulagaraj Selvaraj  and
L. Eric Cross
Keith G. Brooks
Affiliation:
Materials Research Laboratory, The Pennsylvavia State University, University Park, PA, 16802
K. R. Udayakumar
Affiliation:
Materials Research Laboratory, The Pennsylvavia State University, University Park, PA, 16802
Jiayu Chen
Affiliation:
Materials Research Laboratory, The Pennsylvavia State University, University Park, PA, 16802
Ulagaraj Selvaraj
Affiliation:
Materials Research Laboratory, The Pennsylvavia State University, University Park, PA, 16802
L. Eric Cross
Affiliation:
Materials Research Laboratory, The Pennsylvavia State University, University Park, PA, 16802
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Abstract

Smart electroceramics, in the form of ferroelectric thin films show great potential for applications in the field of microelectromechanical systems. Ferroelectric thin films will become a key player due to their optical, mechanical, electrical and thermal sensing with actuating capabilities. Recent results on electromechanical transduction in piezoelectric (e.g. PZT), electrostrictive (e.g. PLZT), and antiferroelectricferroelectric phase switching (e.g. PLZSnT) thin films and their potential applications in smart micromechanical systems are discussed. The possibility of three dimensional structures exists in the emerging technology of ferroelectric fibers. Some exciting applications for these films and fibers include microvalves, ultrasonic micromotors, microrobotic actuators and micropumps.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 276: Symposia U/Y – Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems , 1992 , 11
Copyright
Copyright © Materials Research Society 1992

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References

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