Hostname: page-component-848d4c4894-89wxm Total loading time: 0 Render date: 2024-07-05T23:16:25.823Z Has data issue: false hasContentIssue false
  • English
  • Français

Single-Crystal Fine-Positioning Devices for Scanned-Probe Microscopies

Published online by Cambridge University Press:  15 February 2011

R. N. Kleiman
R. N. Kleiman*
Affiliation:
AT&T Bell Laboratories, Murray Hill, NJ 07974, rnk@physics.att.com
Get access

Abstract

We have developed a novel fine-positioning device for scanned-probe microscopies. Instead of the conventional scanner tube made of ceramic PZT material, we have constructed analogous structures from single-crystal piezoelectric wafers. Single-crystal materials, in particular Lithium Niobate, are available which solve many of the problems inherent with PZT. In addition, their superior thermal and mechanical properties lead to improved performance in a number of significant ways. We discuss the actual implementation of this idea in the construction of a scanner, possible applications for this design, and briefly discuss results obtained.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 406: Symposium L – Diagnostic Techniques for Semiconductor Materials Processing , 1995 , 221
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Binnig, G. and Rohrer, H., Helv. Phys. Acta. 55, p. 726 (1982).Google Scholar
2. Binnig, G. and Smith, D. P. E., Rev. Sci. Instrum. 57, p. 1688 (1986).Google Scholar
3. Kleiman, Rafael N., application to the United States Patent and Trademark Office, March 2, 1995.Google Scholar
4. An overview of PZT properties and scanner tube design can be found in: Chen, C. Julian, Introduction to Scanning Tunneling Microscopy, Oxford University Press, New York, 1993.Google Scholar
5. Properties of Lithium Niobate, INSPEC, The Institution of Electrical Engineers, London, 1989; Prokhorov, A. M. and Kuz'minov, Yu. S., Physics and Chemistry of Crystalline Lithium Niobate, Adam Hilger, Bristol, 1990.Google Scholar
6. A good source for Lithium Niobate wafers is Crystal Technology, Inc., Palo Alto, CA.Google Scholar
7. Data on PZT materials from Morgan Matroc, Inc., Electro Ceramics Division, Bedford, OH.Google Scholar
8. Nakamura, K. and Shimizu, H., Ferroelectrics, 93, p. 211 (1989).Google Scholar
9. Dan'kov, I. A., Tokarev, E. F., Kudryashov, G. S., and Belobaev, K. G., Inorg. Mater. (USA), 19, p. 1049 (1983).Google Scholar
10. This simple scaling is only true with no addendum added to the end of the scanner.Google Scholar
11. Kleiman, Rafael N., to be published.Google Scholar
12. Kleiman, Rafael N., to be published.Google Scholar