Hostname: page-component-848d4c4894-xfwgj Total loading time: 0 Render date: 2024-06-27T01:43:02.386Z Has data issue: false hasContentIssue false
  • English
  • Français

Simulation of Mechanical Deformation and Tribology of Nano-Thin Amorphous Hydrogenated Carbon (a:Ch) Films Using Molecular Dynamics

Published online by Cambridge University Press:  15 February 2011

J. N. Glosli ,
M. R. Philpott  and
J. Belak
J. N. Glosli
Affiliation:
University of California, Lawrence Livermore National Laboratory, Livermore CA 94550
M. R. Philpott
Affiliation:
IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, CA 95120–6099
J. Belak
Affiliation:
University of California, Lawrence Livermore National Laboratory, Livermore CA 94550
Get access

Abstract

Molecular dynamics computer simulations are used to study the effect of substrate temperature on the microstructure of deposited amorphous hydrogenated carbon (a:CH) films. A transition from dense diamond-like films to porous graphite-like films is observed between substrate temperatures of 400K and 600K for a deposition energy of 20 eV. The dense a:CH film grown at 300K and 20 eV has a hardness (˜50 GPa) about half that of a pure carbon (a:C) film grown under the same conditions.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 436: Symposium CC – Thin Films Stresses and Mechanical Properties VI , 1996 , 265
Copyright
Copyright © Materials Research Society 1997

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

(1) Tsai, H-C. and Bogy, D.B., J. Vac. Sci. Tech., A5, 3287 (1987).Google Scholar
(2) Grill, A., Wear, 168, 143 (1993).Google Scholar
(3) Glosli, J.N., Belak, J., and Philpott, M.R., ”Ultra-Thin Carbon Coatings for Head-Disk Interface Tribology,” in Thin Films: Stresses and Mechanical Properties V, Baker, S.P., Ross, C.A., Townsend, P.H., Volkert, C.A., and Borgesen, P. eds., MRS Symposium Proceedings 356, MRS, Pittsburgh, USA 1995.Google Scholar
(4) Glosli, J.N., Philpott, M.R., and Belak, J., ”Molecular Dynamics Simulation of Mechanical Deformation of Ultra-Thin Amorphous Carbon Films,” in Mechanical Behavior of Diamond and Other Forms of Carbon, Drory, M.D., Donley, M.S., Bogy, D., and Field, J.E. eds., MRS Symposium Proceedings, MRS, Pittsburgh, USA, 1995.Google Scholar
(5) Brenner, D.W., Phys. Rev. B42, 9458 (1990).Google Scholar
(6) Brenner, D.W., Harrison, J.A., White, C.T., and Colton, R.J., Thin Solid Films 206, 220 (1991).Google Scholar
(7) Bhargava, S., Bist, H.D., Narliker, A.V., Samanta, S.B., Narayan, J., and Tripathi, H.B., J. Appl. Phys 79, 1917 (1996).Google Scholar