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Simulation Of Diffuse Light Exposure Of Low Temperature Co-Fired Ceramic Tapes And The Problem Of Sidewall Morphology

Published online by Cambridge University Press:  15 February 2011

P. Espinoza-Vallejos ,
J. Santiago-Aviles  and
L. Sola-Laguna
P. Espinoza-Vallejos
Affiliation:
University of Pennsylvania, Room 325, Philadelphia 19104, USA, patricio@ee.upenn.edu
J. Santiago-Aviles
Affiliation:
University of Pennsylvania, Room 325, Philadelphia 19104, USAsantiago@ee.upenn.edu
L. Sola-Laguna
Affiliation:
DuPont, Electronic Materials, Puerto Rico, Luis.M.Sola-1@pri.dupont.com
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Abstract

We have simulated the scattering of UV light in a photo-formable ceramic tape and experimentally measured the transport mean free path (random walk step) between scattering events. After processing the tape we have achieved features size of 70 μm in a 150 μm-thick tape. We were able to predict and control the undercut due to scattering of the light by alumina grains. The experimental verification of the model utilizes a modified version of diffuse-Transmission Spectroscopy (DTS) using the material development characteristics as a sensor. The technique involves the measurement of absorption coefficient by measuring the sample thickness as a function of energy. We also simulated the effect of changing the number density of scatter centers in side-wall morphology.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 579: Symposium B – The Optical Properties of Materials , 1999 , 293
Copyright
Copyright © Materials Research Society 2000

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References

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